GB1380126A - Electron guns - Google Patents

Electron guns

Info

Publication number
GB1380126A
GB1380126A GB1922272A GB1922272A GB1380126A GB 1380126 A GB1380126 A GB 1380126A GB 1922272 A GB1922272 A GB 1922272A GB 1922272 A GB1922272 A GB 1922272A GB 1380126 A GB1380126 A GB 1380126A
Authority
GB
United Kingdom
Prior art keywords
anode
current
electron
amplifier
emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1922272A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cleaver J R A
Smith K C A
Original Assignee
Cleaver J R A
Smith K C A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cleaver J R A, Smith K C A filed Critical Cleaver J R A
Priority to GB1922272A priority Critical patent/GB1380126A/en
Publication of GB1380126A publication Critical patent/GB1380126A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
    • G05F1/00—Automatic systems in which deviations of an electric quantity from one or more predetermined values are detected at the output of the system and fed back to a device within the system to restore the detected quantity to its predetermined value or values, i.e. retroactive systems
    • G05F1/10—Regulating voltage or current
    • G05F1/46—Regulating voltage or current wherein the variable actually regulated by the final control device is dc
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243—Beam current control or regulation circuits

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Automation & Control Theory (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1380126 Automatic control of current K C A SMITH and J R A CLEAVER 24 April 1973 [25 April 1972] 19222/72 Heading G3R [ Also in Division H1] A field emission electron gun has automatic regulation of the electron beam current. In the embodiment, amplifier 7 regulates the current by. varying the voltage of control electrode 10 i.e. the total emission of cathode 1. The actual beam current may be detected using ring electrodes 13, 13' or, as shown, using anode 4 to measure that portion of the beam that passes through hole 3 in anode 2 but does not pass through hole 5 in anode 4. Amplifier 7, which is fed with actual and required beam current signals, is connected to voltage varying means 9 by an insulating path e.g. an optical link using a photo-transistor with a lamp or light emitting diode, or using a transformer or capacitor, the amplifier output being in a pulsed form or modulated by an A. C. carrier. The gun may be turned off if the total cathodic emission, as detected by measuring the current flow to anode 2, exceeds a pre-set value. The cathode 1 may also be heated, and the electron gun used in electron probe micro-analyzers, scanning electron microscopes or electron beam welding apparatus. To facilitate initial outgassing, heating coils may be fitted e.g. to control electrode 10.
GB1922272A 1972-04-25 1972-04-25 Electron guns Expired GB1380126A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1922272A GB1380126A (en) 1972-04-25 1972-04-25 Electron guns

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1922272A GB1380126A (en) 1972-04-25 1972-04-25 Electron guns

Publications (1)

Publication Number Publication Date
GB1380126A true GB1380126A (en) 1975-01-08

Family

ID=10125765

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1922272A Expired GB1380126A (en) 1972-04-25 1972-04-25 Electron guns

Country Status (1)

Country Link
GB (1) GB1380126A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2141578A (en) * 1983-06-15 1984-12-19 American Telephone & Telegraph Electron emission apparatus
GB2313703A (en) * 1996-06-01 1997-12-03 Ibm Current sensing in vacuum electron devices
GB2345205A (en) * 1998-12-16 2000-06-28 Advantest Corp Protection of charged particle generator
EP1104002A1 (en) * 1999-11-29 2001-05-30 Ushiodenki Kabushiki Kaisha Electron beam measurement method and electron beam irradiation processing device
WO2001082324A1 (en) * 2000-04-25 2001-11-01 Mcnc Closed-loop cold cathode current regulator
FR2860339A1 (en) * 2003-12-30 2005-04-01 Commissariat Energie Atomique Electron emitter device for electronic display, has current collection unit that is insulated from extraction grid and collects current from micro-emitter, and polarization units, one polarizing grid and another polarizing cathode
WO2005074001A2 (en) * 2003-12-30 2005-08-11 Commissariat A L'energie Atomique Divergence-controlled hybrid multiple electron beam -emitting device
WO2022263153A1 (en) * 2021-06-18 2022-12-22 Asml Netherlands B.V. System and method for adjusting beam current using a feedback loop in charged particle systems

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2141578A (en) * 1983-06-15 1984-12-19 American Telephone & Telegraph Electron emission apparatus
US6208091B1 (en) 1996-01-06 2001-03-27 International Business Machines Corporation Current sensing in vacuum electron devices
GB2313703A (en) * 1996-06-01 1997-12-03 Ibm Current sensing in vacuum electron devices
GB2313703B (en) * 1996-06-01 2001-03-21 Ibm Current sensing in vacuum electron devices
US6236164B1 (en) 1996-06-01 2001-05-22 International Business Machines Corporation Current sensing in vacuum electron devices
US6320319B1 (en) 1998-12-16 2001-11-20 Advantest Corporation Charged particle generating apparatus
GB2345205A (en) * 1998-12-16 2000-06-28 Advantest Corp Protection of charged particle generator
GB2345205B (en) * 1998-12-16 2001-09-26 Advantest Corp Charged particle generating apparatus
US6657212B2 (en) 1999-11-29 2003-12-02 Ushiodenki Kabushiki Kaisha Electron beam measurement method and electron beam irradiation processing device
EP1104002A1 (en) * 1999-11-29 2001-05-30 Ushiodenki Kabushiki Kaisha Electron beam measurement method and electron beam irradiation processing device
WO2001082324A1 (en) * 2000-04-25 2001-11-01 Mcnc Closed-loop cold cathode current regulator
US6392355B1 (en) 2000-04-25 2002-05-21 Mcnc Closed-loop cold cathode current regulator
US6492781B2 (en) 2000-04-25 2002-12-10 Mcnc Closed-loop cold cathode current regulator
FR2860339A1 (en) * 2003-12-30 2005-04-01 Commissariat Energie Atomique Electron emitter device for electronic display, has current collection unit that is insulated from extraction grid and collects current from micro-emitter, and polarization units, one polarizing grid and another polarizing cathode
WO2005074001A2 (en) * 2003-12-30 2005-08-11 Commissariat A L'energie Atomique Divergence-controlled hybrid multiple electron beam -emitting device
WO2005074001A3 (en) * 2003-12-30 2006-07-20 Commissariat Energie Atomique Divergence-controlled hybrid multiple electron beam -emitting device
US7838839B2 (en) 2003-12-30 2010-11-23 Commissariat A L'energie Atomique Hybrid multibeam electronic emission device with controlled divergence
WO2022263153A1 (en) * 2021-06-18 2022-12-22 Asml Netherlands B.V. System and method for adjusting beam current using a feedback loop in charged particle systems

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Legal Events

Date Code Title Description
PS Patent sealed
48R Reference inserted (sect. 8/1949)
PLE Entries relating assignments, transmissions, licences in the register of patents
PCNP Patent ceased through non-payment of renewal fee