GB1375789A - - Google Patents
Info
- Publication number
- GB1375789A GB1375789A GB1872572A GB1872572A GB1375789A GB 1375789 A GB1375789 A GB 1375789A GB 1872572 A GB1872572 A GB 1872572A GB 1872572 A GB1872572 A GB 1872572A GB 1375789 A GB1375789 A GB 1375789A
- Authority
- GB
- United Kingdom
- Prior art keywords
- anode
- supply
- voltage
- beam current
- current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001276 controlling effect Effects 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 230000005684 electric field Effects 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V17/00—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages
- F21V17/06—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages the fastening being onto or by the lampholder
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/243—Beam current control or regulation circuits
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions
- H02H7/20—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for electronic equipment
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electron Sources, Ion Sources (AREA)
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
Abstract
1375789 Automatic control of electron beam current NIHON DENSHI KK 21 April 1972 [30 April 1971] 18725/72 Headings G3R and G3X The beam current in a field emission electron gun for an electron microscope is regulated by controlling the voltage applied to an anode which determines the strength of the electric field at the electron emitter. In one embodiment, Fig. 2, the current in an emitter I is detected by a device 7, compared with a reference value 9 in a comparator 8, and the resulting output signal used to control a variable D.C. supply 4 connected to a first anode 3 A second anode 5, for accelerating the beam, is connected to a high voltage supply 6. The detector 7 may alternatively be connected between the anode 3 and supply 4, or may take the form of a beam sensor beyond the second anode 5. Such a sensor may be a semi-conductor device or converter plate. The comparator 8 may control a switch connected in parallel with the supply 4: the switch may be manually controlled. The output from the supply 4 may be compared with another reference, to produce a signal to switch off the supply to the anode 3 when a given level is reached, indicative of crystal build up on the emitter tip. The heater supply 2 is automatically increased to restore the tip to its original condition, Fig. 13 (not shown). In other embodiments, Fig. 5 and Figs. 6-8 (not shown), a resistor 11 is connected between the anode 3 and the associated supply. Anode current flowing through the resistor varies with the beam current, and the varying voltage drop across the resistor automatically adjusts the anode voltage to stabilize the beam current. The supply 4 may be omitted and the voltage for the anode 3 derived from a potential divider, which may include a Zener diode, connected across the supply 6.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2875371 | 1971-04-30 | ||
| JP5161071 | 1971-07-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1375789A true GB1375789A (en) | 1974-11-27 |
Family
ID=26366896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1872572A Expired GB1375789A (en) | 1971-04-30 | 1972-04-21 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3825839A (en) |
| DE (2) | DE2221138C3 (en) |
| FR (1) | FR2134396B1 (en) |
| GB (1) | GB1375789A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117850168A (en) * | 2023-11-28 | 2024-04-09 | 上海集成电路材料研究院有限公司 | Electron beam direct writing device |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT988681B (en) * | 1972-07-03 | 1975-04-30 | Ibm | CONTROL SYSTEM FOR ELECTRON EMITTERING DEVICES |
| DE2325786C2 (en) * | 1973-05-22 | 1983-10-06 | Leybold-Heraeus Gmbh, 5000 Koeln | Circuit for regulating the operating parameters of an electron gun |
| DE2325808C2 (en) * | 1973-05-22 | 1983-07-14 | Leybold-Heraeus GmbH, 5000 Köln | Circuit for regulating the operating parameters of an electron gun |
| JPS5279757A (en) * | 1975-12-26 | 1977-07-05 | Hitachi Ltd | Power supply for field emission electron gun |
| US4525652A (en) * | 1982-10-23 | 1985-06-25 | Leybold-Heraeus Gmbh | Auxiliary-voltage source for supplying electric circuits which are at a high potential |
| US4588928A (en) * | 1983-06-15 | 1986-05-13 | At&T Bell Laboratories | Electron emission system |
| US4687970A (en) * | 1985-05-31 | 1987-08-18 | Hughes Aircraft Company | Digital cathode current control loop |
| US5401973A (en) * | 1992-12-04 | 1995-03-28 | Atomic Energy Of Canada Limited | Industrial material processing electron linear accelerator |
| DE10031090A1 (en) * | 2000-06-30 | 2002-01-31 | Acl Lichttechnik Gmbh | Reflector light has forced cooling of light source, and aluminum sheet reflector with protrusions towards protective glass over outlet that support glass at distance from reflector's annular shoulder |
| US6847164B2 (en) | 2002-12-10 | 2005-01-25 | Applied Matrials, Inc. | Current-stabilizing illumination of photocathode electron beam source |
| EP1993119B1 (en) | 2005-09-05 | 2017-11-08 | ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle beam emitting device and method for operating a charged particle beam emitting device |
| CN117501402A (en) * | 2021-06-18 | 2024-02-02 | Asml荷兰有限公司 | System and method for adjusting beam current in charged particle systems using feedback loops |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2384087A (en) * | 1942-04-01 | 1945-09-04 | Rca Corp | Current limiter |
| US3377506A (en) * | 1966-03-30 | 1968-04-09 | United Aircraft Corp | Electromagnetic current control for a hollow cathode |
| US3413517A (en) * | 1967-01-13 | 1968-11-26 | Ibm | Filament current control by a superposed dithering voltage |
| SU490099A1 (en) * | 1968-07-17 | 1975-10-30 | Московский Ордена Ленина Энергетический Институт | Device for automatic regulation of the electric mode of an electrothermal installation with an electron gun |
| NL7012758A (en) * | 1970-08-28 | 1972-03-01 |
-
0
- DE DENDAT221138D patent/DE221138C/de active Active
-
1972
- 1972-04-19 US US00245328A patent/US3825839A/en not_active Expired - Lifetime
- 1972-04-20 FR FR7214004A patent/FR2134396B1/fr not_active Expired
- 1972-04-21 GB GB1872572A patent/GB1375789A/en not_active Expired
- 1972-04-28 DE DE2221138A patent/DE2221138C3/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117850168A (en) * | 2023-11-28 | 2024-04-09 | 上海集成电路材料研究院有限公司 | Electron beam direct writing device |
Also Published As
| Publication number | Publication date |
|---|---|
| DE221138C (en) | |
| DE2221138A1 (en) | 1972-11-23 |
| US3825839A (en) | 1974-07-23 |
| DE2221138B2 (en) | 1976-06-16 |
| DE2221138C3 (en) | 1979-07-19 |
| FR2134396B1 (en) | 1976-08-06 |
| FR2134396A1 (en) | 1972-12-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |