FR2134396B1 - - Google Patents

Info

Publication number
FR2134396B1
FR2134396B1 FR7214004A FR7214004A FR2134396B1 FR 2134396 B1 FR2134396 B1 FR 2134396B1 FR 7214004 A FR7214004 A FR 7214004A FR 7214004 A FR7214004 A FR 7214004A FR 2134396 B1 FR2134396 B1 FR 2134396B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7214004A
Other languages
French (fr)
Other versions
FR2134396A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of FR2134396A1 publication Critical patent/FR2134396A1/fr
Application granted granted Critical
Publication of FR2134396B1 publication Critical patent/FR2134396B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V17/00—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages
    • F21V17/06—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages the fastening being onto or by the lampholder
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243—Beam current control or regulation circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
    • H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions
    • H02H7/20—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for electronic equipment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
FR7214004A 1971-04-30 1972-04-20 Expired FR2134396B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2875371 1971-04-30
JP5161071 1971-07-12

Publications (2)

Publication Number Publication Date
FR2134396A1 FR2134396A1 (en) 1972-12-08
FR2134396B1 true FR2134396B1 (en) 1976-08-06

Family

ID=26366896

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7214004A Expired FR2134396B1 (en) 1971-04-30 1972-04-20

Country Status (4)

Country Link
US (1) US3825839A (en)
DE (2) DE2221138C3 (en)
FR (1) FR2134396B1 (en)
GB (1) GB1375789A (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT988681B (en) * 1972-07-03 1975-04-30 Ibm CONTROL SYSTEM FOR ELECTRON EMITTERING DEVICES
DE2325786C2 (en) * 1973-05-22 1983-10-06 Leybold-Heraeus Gmbh, 5000 Koeln Circuit for regulating the operating parameters of an electron gun
DE2325808C2 (en) * 1973-05-22 1983-07-14 Leybold-Heraeus GmbH, 5000 Köln Circuit for regulating the operating parameters of an electron gun
JPS5279757A (en) * 1975-12-26 1977-07-05 Hitachi Ltd Power supply for field emission electron gun
FR2535108B1 (en) * 1982-10-23 1987-11-20 Leybold Heraeus Gmbh & Co Kg AUXILIARY VOLTAGE SOURCE FOR SUPPLYING ELECTRICAL ASSEMBLIES CARRIED OUT TO HIGH VOLTAGE POTENTIAL
US4588928A (en) * 1983-06-15 1986-05-13 At&T Bell Laboratories Electron emission system
US4687970A (en) * 1985-05-31 1987-08-18 Hughes Aircraft Company Digital cathode current control loop
US5401973A (en) * 1992-12-04 1995-03-28 Atomic Energy Of Canada Limited Industrial material processing electron linear accelerator
DE10031090A1 (en) * 2000-06-30 2002-01-31 Acl Lichttechnik Gmbh Reflector light has forced cooling of light source, and aluminum sheet reflector with protrusions towards protective glass over outlet that support glass at distance from reflector's annular shoulder
US6847164B2 (en) 2002-12-10 2005-01-25 Applied Matrials, Inc. Current-stabilizing illumination of photocathode electron beam source
EP1993119B1 (en) 2005-09-05 2017-11-08 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam emitting device and method for operating a charged particle beam emitting device
WO2022263153A1 (en) * 2021-06-18 2022-12-22 Asml Netherlands B.V. System and method for adjusting beam current using a feedback loop in charged particle systems
CN117850168A (en) * 2023-11-28 2024-04-09 上海集成电路材料研究院有限公司 Electron beam direct writing device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2384087A (en) * 1942-04-01 1945-09-04 Rca Corp Current limiter
US3377506A (en) * 1966-03-30 1968-04-09 United Aircraft Corp Electromagnetic current control for a hollow cathode
US3413517A (en) * 1967-01-13 1968-11-26 Ibm Filament current control by a superposed dithering voltage
SU490099A1 (en) * 1968-07-17 1975-10-30 Московский Ордена Ленина Энергетический Институт Device for automatic regulation of the electric mode of an electrothermal installation with an electron gun
NL7012758A (en) * 1970-08-28 1972-03-01

Also Published As

Publication number Publication date
FR2134396A1 (en) 1972-12-08
DE2221138B2 (en) 1976-06-16
DE2221138C3 (en) 1979-07-19
DE2221138A1 (en) 1972-11-23
DE221138C (en)
US3825839A (en) 1974-07-23
GB1375789A (en) 1974-11-27

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Legal Events

Date Code Title Description
ST Notification of lapse