DE878685C - Method for imaging objects with the field emission microscope - Google Patents

Method for imaging objects with the field emission microscope

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Publication number
DE878685C
DE878685C DEST3212A DEST003212A DE878685C DE 878685 C DE878685 C DE 878685C DE ST3212 A DEST3212 A DE ST3212A DE ST003212 A DEST003212 A DE ST003212A DE 878685 C DE878685 C DE 878685C
Authority
DE
Germany
Prior art keywords
field emission
imaging objects
emission microscope
pulses
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DEST3212A
Other languages
German (de)
Inventor
Wilhelm Dipl-Chem Dr Stuermer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to DEST3212A priority Critical patent/DE878685C/en
Application granted granted Critical
Publication of DE878685C publication Critical patent/DE878685C/en
Expired legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Description

Verfahren zur Abbildung von Objekten mit dem Feldemissionsmikroskop Bei dem Feldemissionsmikroskop wird eine feine Wolframspitze durch eine davor befindliche Anode mit hoher Gleichspannung zur Feldemission angeregt. Durch den fließenden Bildstrom wird diese Spitze je nach Bildhelligkeit mehr oder weniger aufgeheizt, schätzungsweise auf 6oo bis 8oo' K. Hierdurch ist es nicht möglich, auf längere Zeit ein ruhiges Bild der Kathode bzw. der darauf adsorbierten Substanzen zu gewinnen.Method for imaging objects with the field emission microscope In the field emission microscope, a fine tungsten tip is excited to field emission by an anode in front of it with a high DC voltage. Due to the flowing image current, this peak is heated to a greater or lesser extent depending on the image brightness, estimated to be 600 to 800 K. This means that it is not possible to obtain a steady image of the cathode or the substances adsorbed on it over a longer period of time.

Um diesen Nachteil abzuhelfen, wird die Feldemission statt mit einer konstanten Gleichspannung mit entsprechend hohen Impulsen angeregt, wobei die Impulsfolge so bemessen wird, daß ein Aufheizen der Spitze durch die entstehende Joulesche Wärme vermieden wird. Als Impulsgeber kann z. B. ein in der Impulstechnik üblicher Sperrschwinger mit geeignet hoher Frequenz benutzt werden. Ein weiterer Vorteil eines solchen Impulsgebers ist der, daß mit Hilfe einer geringen Induktivität auch die Heizung der Kathode durchgeführt werden kann. Durch geeignete Formgebung der Impulse ist es möglich, bestimmte Emissionsniveaus stärker hervorzuheben. Legt man zwischen den einzelnen Impulsen an die Anode einen geeigneten negativen Impuls, dann werden eventuell entstandene Ionen des Restgases oder der verdampften Substanz abgebremst oder zur Umkehr gezwungen, so daß eine Erwärmung und damit eine Zerstörung des Objekts auf der Spitze vermieden wird.To remedy this disadvantage, the field emission is instead of a constant DC voltage excited with correspondingly high pulses, the pulse train is dimensioned in such a way that the tip is heated up by the Joule heat produced is avoided. As a pulse generator z. B. a blocking oscillator common in pulse technology be used at a suitably high frequency. Another advantage of such a pulse generator is that with the help of a low inductance also the heating of the cathode can be carried out. By appropriately shaping the impulses, it is possible to emphasize certain emission levels more strongly. If you put between the individual Pulses sent to the anode are then a suitable negative pulse that may have arisen Ions of the residual gas or the vaporized substance slowed down or forced to reverse, so that heating and thus destruction of the object on the tip is avoided will.

Claims (2)

PATENTANSPRÜCHE: i. Verfahren zur Abbildung von Objekten mit dem Feldemissionsmikroskop, dadurch gekennzeichnet, daß an die Anode Impulse von geeigneter Höhe angelegt werden, die mit einem solchen Abstand aufeinander folgen, daß die Kathode kalt bleibt und eine Störung des zu beobachtenden Objekts _durch Wärme oder Ionenbeschuß vermindert oder vermieden wird. PATENT CLAIMS: i. Method for imaging objects with the field emission microscope, characterized in that pulses of suitable height are applied to the anode, which follow one another with such a spacing that the cathode remains cold and interference with the object to be observed by heat or ion bombardment is reduced or avoided will. 2. Verfahren nach Anspruch i, dadurch gekennzeichnet, daß durch geeignete Formgebung der Impulse oder periodische Folge verschieder hoher Impulse bestimmte Emis-sionsniveau! hervorgehoben werden. 3. Verfahren nach Anspruch i, dadurch ge, kennzeichnet, cl#ß vo m Impulsgeber gleichzeitig eine Aufheizung der Kathode und des Getter. materials ermöglicht wird.2. The method according to claim i, characterized in that by suitable shaping of the pulses or periodic sequence of different high pulses certain emission level! highlighted. 3. The method according to claim i, characterized in that cl # ß vo m pulse generator simultaneously heating the cathode and the getter. materials is made possible.
DEST3212A 1951-03-28 1951-03-28 Method for imaging objects with the field emission microscope Expired DE878685C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DEST3212A DE878685C (en) 1951-03-28 1951-03-28 Method for imaging objects with the field emission microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEST3212A DE878685C (en) 1951-03-28 1951-03-28 Method for imaging objects with the field emission microscope

Publications (1)

Publication Number Publication Date
DE878685C true DE878685C (en) 1953-06-05

Family

ID=7453106

Family Applications (1)

Application Number Title Priority Date Filing Date
DEST3212A Expired DE878685C (en) 1951-03-28 1951-03-28 Method for imaging objects with the field emission microscope

Country Status (1)

Country Link
DE (1) DE878685C (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2193248A1 (en) * 1972-07-17 1974-02-15 Jeol Ltd

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2193248A1 (en) * 1972-07-17 1974-02-15 Jeol Ltd

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