GB1422287A - Insulated gate transistor - Google Patents

Insulated gate transistor

Info

Publication number
GB1422287A
GB1422287A GB5978673A GB5978673A GB1422287A GB 1422287 A GB1422287 A GB 1422287A GB 5978673 A GB5978673 A GB 5978673A GB 5978673 A GB5978673 A GB 5978673A GB 1422287 A GB1422287 A GB 1422287A
Authority
GB
United Kingdom
Prior art keywords
layer
substrate
source
drain electrodes
polycrystalline silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5978673A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suwa Seikosha KK
Original Assignee
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suwa Seikosha KK filed Critical Suwa Seikosha KK
Publication of GB1422287A publication Critical patent/GB1422287A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/66—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes
    • H10D64/661—Electrodes having a conductor capacitively coupled to a semiconductor by an insulator, e.g. MIS electrodes the conductor comprising a layer of silicon contacting the insulator, e.g. polysilicon having vertical doping variation
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs
    • H10D64/511—Gate electrodes for field-effect devices for FETs for IGFETs
    • H10D64/517—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers
    • H10D64/519—Gate electrodes for field-effect devices for FETs for IGFETs characterised by the conducting layers characterised by their top-view geometrical layouts
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Element Separation (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
GB5978673A 1973-01-09 1973-12-27 Insulated gate transistor Expired GB1422287A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP493473A JPS5611226B2 (https=) 1973-01-09 1973-01-09

Publications (1)

Publication Number Publication Date
GB1422287A true GB1422287A (en) 1976-01-21

Family

ID=11597394

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5978673A Expired GB1422287A (en) 1973-01-09 1973-12-27 Insulated gate transistor

Country Status (3)

Country Link
US (1) US3938174A (https=)
JP (1) JPS5611226B2 (https=)
GB (1) GB1422287A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2123605A (en) * 1982-06-22 1984-02-01 Standard Microsyst Smc MOS integrated circuit structure and method for its fabrication

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51118969A (en) * 1975-04-11 1976-10-19 Fujitsu Ltd Manufacturing method of semiconductor memory
JPS54107268A (en) * 1978-02-10 1979-08-22 Toshiba Corp Integrated circuit unit and its production
JPS6173621U (https=) * 1984-10-16 1986-05-19
US4811066A (en) * 1987-10-19 1989-03-07 Motorola, Inc. Compact multi-state ROM cell
JPH0389555A (ja) * 1989-09-01 1991-04-15 Hitachi Ltd 半導体装置及びその製法
US5644155A (en) * 1994-09-06 1997-07-01 Integrated Device Technology, Inc. Structure and fabrication of high capacitance insulated-gate field effect transistor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3711753A (en) * 1971-06-04 1973-01-16 Signetics Corp Enhancement mode n-channel mos structure and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2123605A (en) * 1982-06-22 1984-02-01 Standard Microsyst Smc MOS integrated circuit structure and method for its fabrication

Also Published As

Publication number Publication date
JPS4991783A (https=) 1974-09-02
US3938174A (en) 1976-02-10
JPS5611226B2 (https=) 1981-03-12

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PE20 Patent expired after termination of 20 years

Effective date: 19931226