GB1399571A - Workpiece support for glow discharge apparatus - Google Patents

Workpiece support for glow discharge apparatus

Info

Publication number
GB1399571A
GB1399571A GB2139573A GB2139573A GB1399571A GB 1399571 A GB1399571 A GB 1399571A GB 2139573 A GB2139573 A GB 2139573A GB 2139573 A GB2139573 A GB 2139573A GB 1399571 A GB1399571 A GB 1399571A
Authority
GB
United Kingdom
Prior art keywords
base
tube
electrode
workpiece
discharge apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2139573A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of GB1399571A publication Critical patent/GB1399571A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Discharge Heating (AREA)
  • Physical Vapour Deposition (AREA)
  • Furnace Charging Or Discharging (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
GB2139573A 1972-05-08 1973-05-04 Workpiece support for glow discharge apparatus Expired GB1399571A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US25127472A 1972-05-08 1972-05-08

Publications (1)

Publication Number Publication Date
GB1399571A true GB1399571A (en) 1975-07-02

Family

ID=22951228

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2139573A Expired GB1399571A (en) 1972-05-08 1973-05-04 Workpiece support for glow discharge apparatus

Country Status (4)

Country Link
US (1) US3739220A (enExample)
JP (1) JPS5510664B2 (enExample)
DE (1) DE2322689A1 (enExample)
GB (1) GB1399571A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2606454C2 (de) * 1976-02-18 1978-01-12 lonit Anstalt Bernhard Berghaus, Vaduz Thermoelementeinsatz
US4328258A (en) * 1977-12-05 1982-05-04 Plasma Physics Corp. Method of forming semiconducting materials and barriers
US4226897A (en) * 1977-12-05 1980-10-07 Plasma Physics Corporation Method of forming semiconducting materials and barriers
JP2571421B2 (ja) * 1988-07-04 1997-01-16 大同特殊鋼株式会社 プラズマ浸炭熱処理炉
JPH08209352A (ja) * 1995-02-06 1996-08-13 Hitachi Ltd プラズマ処理装置および方法
CN105132858B (zh) * 2015-08-06 2017-11-10 西华大学 内孔局域辉光等离子体放电装置及其使用方法

Also Published As

Publication number Publication date
US3739220A (en) 1973-06-12
JPS4961793A (enExample) 1974-06-14
DE2322689A1 (de) 1973-11-22
JPS5510664B2 (enExample) 1980-03-18

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee