KR890011669A - 플라즈마 토오치 - Google Patents

플라즈마 토오치 Download PDF

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Publication number
KR890011669A
KR890011669A KR1019890000720A KR890000720A KR890011669A KR 890011669 A KR890011669 A KR 890011669A KR 1019890000720 A KR1019890000720 A KR 1019890000720A KR 890000720 A KR890000720 A KR 890000720A KR 890011669 A KR890011669 A KR 890011669A
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KR
South Korea
Prior art keywords
plasma torch
plasma
electrode
material layer
layer
Prior art date
Application number
KR1019890000720A
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English (en)
Inventor
조안네 에이케랜드 인거
쫍페 퍼
Original Assignee
너트 에이.니가아다, 쏘르 피더슨
엘켐 테크놀로지 에이/에스
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 너트 에이.니가아다, 쏘르 피더슨, 엘켐 테크놀로지 에이/에스 filed Critical 너트 에이.니가아다, 쏘르 피더슨
Publication of KR890011669A publication Critical patent/KR890011669A/ko

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Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/32Plasma torches using an arc
    • H05H1/34Details, e.g. electrodes, nozzles
    • H05H1/3423Connecting means, e.g. electrical connecting means or fluid connections
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/32Plasma torches using an arc
    • H05H1/34Details, e.g. electrodes, nozzles
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/26Plasma torches
    • H05H1/28Cooling arrangements

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Arc Welding In General (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)

Abstract

내용 없음

Description

플라즈마 토오치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 플라즈마 토오치의 종단면도.
제2도는 외부전극이 세라믹튜브로 둘러싸인 본 발명에 따른 제2의 플라즈마 토오치 실시예의 종단면도.

Claims (7)

  1. 비소모성재료로 만들어지는 고리형 외부전극(1)과 이고리형 외부전극(1)에 동축으로 삽입되는 내부전극(1a)사이에서 형성되는 전기아아크에의해 고온 플라즈마를 발생시키기 위한 플라즈마 토오치로서, 상기 외부전극(1)은 냉각매체를 이동시키기 위한 내부 챈널을 구비한 동 파이프로 구성되며, 상기 동파이프는 적어도 그 외축에 내화성재료층(7)을 갖는 것을 특징으로 하는 플라즈마 토오치.
  2. 제1항에 있어서, 상기 내화성재료층(7)은 1-5mm, 바람직하게는 2-4mm의 두께를 갖는 것을 특징으로 하는 플라즈마 토오치.
  3. 제1항 또는 제2항에 있어서, 상기 내화성재료층은 5-22%, 바람직하게는 20% MgO 및/또는 Y2O3로 안정화된 ZrO2또는 기타의 희토류 원소의 산화물로 이루어지고, 불꽃 또는 플라즈마 용사에 의해 가해진 것을 특징으로 하는 플라즈마 토오치.
  4. 제1항 또는 제2항에 있어서, 상기 층(7)은 불꽃 또는 플라즈마 용사에 의해 가해진 Al2O3로 이루어지는 것을 특징으로 하는 플라즈마 토오치.
  5. 제1항 내지 제4항에 있어서, 세라믹재료로 만들어지는 튜브(8)는 고리형 외부전극(1)의 외측에 간격을 두고 배열되는 것을 특징으로 하는 플라즈마 토오치.
  6. 제5항에 있어서, 상기 세라믹튜드(8)는 알루미늄 산화물로 만들어지는 것을 특징으로 하는 플라즈마 토오치.
  7. 제1항 내지 제6항에 있어서, 내부전극(1a)는 냉각매체순환용 내부 챈널을 갖는 동 또는 흑연으로 만들어지는 것을 특징으로 하는 플라즈마 토오치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019890000720A 1988-01-25 1989-01-24 플라즈마 토오치 KR890011669A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NO880288A NO163412B (no) 1988-01-25 1988-01-25 Plasmalanse.
NO880288 1988-01-25

Publications (1)

Publication Number Publication Date
KR890011669A true KR890011669A (ko) 1989-08-21

Family

ID=19890591

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890000720A KR890011669A (ko) 1988-01-25 1989-01-24 플라즈마 토오치

Country Status (5)

Country Link
US (1) US5103072A (ko)
EP (1) EP0326318A3 (ko)
JP (1) JPH026073A (ko)
KR (1) KR890011669A (ko)
NO (1) NO163412B (ko)

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NO174450C (no) * 1991-12-12 1994-05-04 Kvaerner Eng Anordning ved plasmabrenner for kjemiske prosesser
NO174180C (no) * 1991-12-12 1994-03-23 Kvaerner Eng Innföringsrör for brenner for kjemiske prosesser
JP2591371Y2 (ja) * 1993-02-24 1999-03-03 株式会社小松製作所 プラズマアークトーチ
DE19707699C1 (de) * 1997-02-26 1998-07-23 Oliver Dr Ing Prause Plasmabrenner für Plasmaspritzanlagen
JP3510993B2 (ja) 1999-12-10 2004-03-29 トーカロ株式会社 プラズマ処理容器内部材およびその製造方法
TW514996B (en) 1999-12-10 2002-12-21 Tokyo Electron Ltd Processing apparatus with a chamber having therein a high-corrosion-resistant sprayed film
TW469757B (en) * 1999-12-13 2001-12-21 Nippon Steel Corp A transferred plasma heating anode
ES2280514T3 (es) * 2001-02-14 2007-09-16 Nippon Steel Corporation Soplete de plasma para calentar acero fundido.
JP2002307160A (ja) * 2001-04-11 2002-10-22 Nippon Steel Corp 移行型プラズマ加熱用陽極
US7166166B2 (en) 2002-09-30 2007-01-23 Tokyo Electron Limited Method and apparatus for an improved baffle plate in a plasma processing system
US6837966B2 (en) 2002-09-30 2005-01-04 Tokyo Electron Limeted Method and apparatus for an improved baffle plate in a plasma processing system
US6798519B2 (en) 2002-09-30 2004-09-28 Tokyo Electron Limited Method and apparatus for an improved optical window deposition shield in a plasma processing system
US7137353B2 (en) 2002-09-30 2006-11-21 Tokyo Electron Limited Method and apparatus for an improved deposition shield in a plasma processing system
US7204912B2 (en) 2002-09-30 2007-04-17 Tokyo Electron Limited Method and apparatus for an improved bellows shield in a plasma processing system
US7780786B2 (en) 2002-11-28 2010-08-24 Tokyo Electron Limited Internal member of a plasma processing vessel
DE102004010287B4 (de) * 2004-03-02 2007-11-15 Howaldtswerke-Deutsche Werft Gmbh Unterpulver-Schweißverfahren
IL168286A (en) * 2005-04-28 2009-09-22 E E R Env Energy Resrc Israel Plasma torch for use in a waste processing chamber
FR2897747B1 (fr) 2006-02-23 2008-09-19 Commissariat Energie Atomique Torche a plasma a arc transfere
JP4762353B1 (ja) 2010-03-31 2011-08-31 ナミックス株式会社 リチウムイオン二次電池及びその製造方法
JP6936441B2 (ja) * 2017-08-10 2021-09-15 秀一 宮原 大気圧プラズマ装置

Family Cites Families (15)

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BE570745A (ko) * 1957-08-28
GB1116515A (en) * 1964-10-29 1968-06-06 Westinghouse Electric Corp Non-consumable arc electrode
DE2206369B2 (de) * 1972-02-17 1976-06-16 Plasmatron zum metallschmelzen
FR2217902A1 (en) * 1973-02-12 1974-09-06 Anvar Plasma generator with reduced electrode wear - due to a coating of refractory oxide(s) on the electrode
JPS5426144B2 (ko) * 1973-05-16 1979-09-01
AT330382B (de) * 1974-05-28 1976-06-25 Ver Edelstahlwerke Ag Vorrichtung zur herstellung von blocken aus hochschmelzenden metallen, insbesondere stahl, durch elektroschlackenumschmelzen
US4017672A (en) * 1976-03-11 1977-04-12 Paton Boris E Plasma-arc furnace for remelting metals and alloys
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JPS5841939B2 (ja) * 1976-12-29 1983-09-16 大同特殊鋼株式会社 加熱装置及び加熱方法
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US4133987A (en) * 1977-12-07 1979-01-09 Institut Elektrosvarki Imeni E.O. Patona Adakemii Nauk Electrode assembly for plasma arc torches
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Also Published As

Publication number Publication date
NO880288D0 (no) 1988-01-25
US5103072A (en) 1992-04-07
JPH026073A (ja) 1990-01-10
NO163412B (no) 1990-02-12
EP0326318A3 (en) 1989-10-11
EP0326318A2 (en) 1989-08-02
NO880288L (no) 1989-07-26

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