GB1394102A - Corpuscular beam apparatus - Google Patents

Corpuscular beam apparatus

Info

Publication number
GB1394102A
GB1394102A GB3330572A GB3330572A GB1394102A GB 1394102 A GB1394102 A GB 1394102A GB 3330572 A GB3330572 A GB 3330572A GB 3330572 A GB3330572 A GB 3330572A GB 1394102 A GB1394102 A GB 1394102A
Authority
GB
United Kingdom
Prior art keywords
digital
counter
supplied
magnification
counter reading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3330572A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of GB1394102A publication Critical patent/GB1394102A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
GB3330572A 1971-09-28 1972-07-17 Corpuscular beam apparatus Expired GB1394102A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2149108A DE2149108C3 (de) 1971-09-28 1971-09-28 Einrichtung zur VergröBerungseinstellung eines Elektronenmikroskops

Publications (1)

Publication Number Publication Date
GB1394102A true GB1394102A (en) 1975-05-14

Family

ID=5821228

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3330572A Expired GB1394102A (en) 1971-09-28 1972-07-17 Corpuscular beam apparatus

Country Status (5)

Country Link
US (1) US3757117A (enrdf_load_stackoverflow)
JP (1) JPS4843261A (enrdf_load_stackoverflow)
DE (1) DE2149108C3 (enrdf_load_stackoverflow)
GB (1) GB1394102A (enrdf_load_stackoverflow)
NL (1) NL7209350A (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5354465A (en) * 1976-10-28 1978-05-17 Jeol Ltd Lens control circuit for electromicroscope or the like
JPS563125Y2 (enrdf_load_stackoverflow) * 1977-09-16 1981-01-23
JPS54107646U (enrdf_load_stackoverflow) * 1978-01-17 1979-07-28
JPS56149761A (en) 1980-04-23 1981-11-19 Hitachi Ltd Electron beam controller
JPS57212754A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Electron-beam controller for electron microscope
JPS5814460A (ja) * 1981-07-17 1983-01-27 Internatl Precision Inc 電子顕微鏡の焦点合わせ方法及びこの方法を応用した像撮影方法及び装置
JPS63207612A (ja) * 1987-02-24 1988-08-29 日本碍子株式会社 セラミツク押出法及びそれに用いる装置
US4818873A (en) * 1987-10-30 1989-04-04 Vickers Instruments (Canada) Inc. Apparatus for automatically controlling the magnification factor of a scanning electron microscope
JP2673900B2 (ja) * 1988-12-05 1997-11-05 株式会社日立製作所 電子顕微鏡
JP4727777B2 (ja) * 1999-05-24 2011-07-20 株式会社日立製作所 走査形電子顕微鏡による測長方法

Also Published As

Publication number Publication date
US3757117A (en) 1973-09-04
DE2149108B2 (de) 1974-10-03
DE2149108A1 (de) 1973-04-05
JPS4843261A (enrdf_load_stackoverflow) 1973-06-22
NL7209350A (enrdf_load_stackoverflow) 1973-03-30
DE2149108C3 (de) 1975-05-15

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee