NL7209350A - - Google Patents

Info

Publication number
NL7209350A
NL7209350A NL7209350A NL7209350A NL7209350A NL 7209350 A NL7209350 A NL 7209350A NL 7209350 A NL7209350 A NL 7209350A NL 7209350 A NL7209350 A NL 7209350A NL 7209350 A NL7209350 A NL 7209350A
Authority
NL
Netherlands
Application number
NL7209350A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7209350A publication Critical patent/NL7209350A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
NL7209350A 1971-09-28 1972-07-04 NL7209350A (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2149108A DE2149108C3 (de) 1971-09-28 1971-09-28 Einrichtung zur VergröBerungseinstellung eines Elektronenmikroskops

Publications (1)

Publication Number Publication Date
NL7209350A true NL7209350A (xx) 1973-03-30

Family

ID=5821228

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7209350A NL7209350A (xx) 1971-09-28 1972-07-04

Country Status (5)

Country Link
US (1) US3757117A (xx)
JP (1) JPS4843261A (xx)
DE (1) DE2149108C3 (xx)
GB (1) GB1394102A (xx)
NL (1) NL7209350A (xx)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5354465A (en) * 1976-10-28 1978-05-17 Jeol Ltd Lens control circuit for electromicroscope or the like
JPS563125Y2 (xx) * 1977-09-16 1981-01-23
JPS54107646U (xx) * 1978-01-17 1979-07-28
JPS57212754A (en) * 1981-06-24 1982-12-27 Hitachi Ltd Electron-beam controller for electron microscope
JPS5814460A (ja) * 1981-07-17 1983-01-27 Internatl Precision Inc 電子顕微鏡の焦点合わせ方法及びこの方法を応用した像撮影方法及び装置
JPS63207612A (ja) * 1987-02-24 1988-08-29 日本碍子株式会社 セラミツク押出法及びそれに用いる装置
US4818873A (en) * 1987-10-30 1989-04-04 Vickers Instruments (Canada) Inc. Apparatus for automatically controlling the magnification factor of a scanning electron microscope
JP2673900B2 (ja) * 1988-12-05 1997-11-05 株式会社日立製作所 電子顕微鏡
JP4727777B2 (ja) * 1999-05-24 2011-07-20 株式会社日立製作所 走査形電子顕微鏡による測長方法

Also Published As

Publication number Publication date
GB1394102A (en) 1975-05-14
US3757117A (en) 1973-09-04
DE2149108C3 (de) 1975-05-15
DE2149108B2 (de) 1974-10-03
JPS4843261A (xx) 1973-06-22
DE2149108A1 (de) 1973-04-05

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Legal Events

Date Code Title Description
BA A request for search or an international-type search has been filed
BV The patent application has lapsed