GB1391336A - Apparatus for a scanning electron microscope and method of use - Google Patents

Apparatus for a scanning electron microscope and method of use

Info

Publication number
GB1391336A
GB1391336A GB1190472A GB1190472A GB1391336A GB 1391336 A GB1391336 A GB 1391336A GB 1190472 A GB1190472 A GB 1190472A GB 1190472 A GB1190472 A GB 1190472A GB 1391336 A GB1391336 A GB 1391336A
Authority
GB
United Kingdom
Prior art keywords
specimen
chamber
frost
holder
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1190472A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1757871U external-priority patent/JPS5120680Y2/ja
Priority claimed from JP10057771U external-priority patent/JPS5127716Y2/ja
Priority claimed from JP46087408A external-priority patent/JPS5116252B2/ja
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB1391336A publication Critical patent/GB1391336A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
GB1190472A 1971-03-16 1972-03-14 Apparatus for a scanning electron microscope and method of use Expired GB1391336A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP1757871U JPS5120680Y2 (enrdf_load_stackoverflow) 1971-03-16 1971-03-16
JP10057771U JPS5127716Y2 (enrdf_load_stackoverflow) 1971-10-29 1971-10-29
JP46087408A JPS5116252B2 (enrdf_load_stackoverflow) 1971-11-02 1971-11-02

Publications (1)

Publication Number Publication Date
GB1391336A true GB1391336A (en) 1975-04-23

Family

ID=27281891

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1190472A Expired GB1391336A (en) 1971-03-16 1972-03-14 Apparatus for a scanning electron microscope and method of use

Country Status (4)

Country Link
US (1) US3761709A (enrdf_load_stackoverflow)
DE (1) DE2211423C3 (enrdf_load_stackoverflow)
FR (1) FR2130141B1 (enrdf_load_stackoverflow)
GB (1) GB1391336A (enrdf_load_stackoverflow)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3952203A (en) * 1972-07-21 1976-04-20 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. Object adjustment device for a charged particle beam apparatus
US3858049A (en) * 1973-09-17 1974-12-31 Etec Corp Method and apparatus for sem specimen coating and transfer
US3885158A (en) * 1973-10-23 1975-05-20 Harris Corp Specimen block and specimen block holder
US3980885A (en) * 1974-09-06 1976-09-14 Vincent William Steward Diagnosis by proton bombardment
US3984683A (en) * 1975-05-27 1976-10-05 Rca Corporation Apparatus and method for analyzing biological cells for malignancy
JPS5478076A (en) * 1977-12-05 1979-06-21 Hitachi Ltd Frozen sample observation device of scanning electron microscope and similar unit
DE2906153C2 (de) * 1979-02-17 1984-10-31 C. Reichert Optische Werke Ag, Wien Kühlkammer zur Aufnahme von zu bearbeitenden Objekten, insbesondere biologischen Objekten
JPS56121151U (enrdf_load_stackoverflow) * 1980-02-15 1981-09-16
JPS6285840A (ja) * 1985-10-11 1987-04-20 Kureha Chem Ind Co Ltd 走査型電子顕微鏡を用いた試料処理方法および装置
JPH0668962B2 (ja) * 1987-12-21 1994-08-31 株式会社東芝 真空装置及びそれを用いてプロセスを行う方法
US4916314A (en) * 1988-09-23 1990-04-10 Amoco Corporation Method and apparatus for analyzing components of selected fluid inclusions
JPH0374036A (ja) * 1989-08-11 1991-03-28 Jeol Ltd 電子顕微鏡における試料交換装置
DE4041029C1 (en) * 1990-12-20 1992-02-06 Siemens Nixdorf Informationssysteme Ag, 4790 Paderborn, De Component cooler for vacuum chamber - has stamper-like heat sink inserted in sealed opening and directly contacting base of component
US5362964A (en) * 1993-07-30 1994-11-08 Electroscan Corporation Environmental scanning electron microscope
US5412211A (en) * 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope
DE69739785D1 (de) * 1996-12-23 2010-04-08 Fei Co Partikel-optisches Gerät mit Niedertemperatur-Probenhalter
NL1021376C1 (nl) * 2002-09-02 2004-03-03 Fei Co Werkwijze voor het verkrijgen van een deeltjes-optische afbeelding van een sample in een deeltjes-optisch toestel.
CN101461026B (zh) * 2006-06-07 2012-01-18 Fei公司 与包含真空室的装置一起使用的滑动轴承

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2417213A (en) * 1944-12-28 1947-03-11 Rca Corp Device for indirect heating of materials
US2826701A (en) * 1954-09-01 1958-03-11 Gen Electric Low temperature chamber for electronoptics instruments
FR1520418A (fr) * 1965-11-25 1968-04-12 Balzers Patent Beteilig Ag Microscope à émission électronique
US3483373A (en) * 1966-07-28 1969-12-09 Siemens Ag Airlock assembly for corpuscular ray devices
US3374349A (en) * 1966-11-14 1968-03-19 Victor G. Macres Electron probe having a specific shortfocal length magnetic lens and light microscope

Also Published As

Publication number Publication date
DE2211423A1 (de) 1972-09-21
FR2130141B1 (enrdf_load_stackoverflow) 1976-06-11
DE2211423C3 (de) 1979-11-08
US3761709A (en) 1973-09-25
DE2211423B2 (de) 1979-03-15
FR2130141A1 (enrdf_load_stackoverflow) 1972-11-03

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee