FR1520418A - Microscope à émission électronique - Google Patents

Microscope à émission électronique

Info

Publication number
FR1520418A
FR1520418A FR84944A FR84944A FR1520418A FR 1520418 A FR1520418 A FR 1520418A FR 84944 A FR84944 A FR 84944A FR 84944 A FR84944 A FR 84944A FR 1520418 A FR1520418 A FR 1520418A
Authority
FR
France
Prior art keywords
electronic emission
emission microscope
microscope
electronic
emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR84944A
Other languages
English (en)
Inventor
Lienhard Wegmann
Rolf Graber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from CH1636765A external-priority patent/CH455959A/de
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Priority to FR84944A priority Critical patent/FR1520418A/fr
Application granted granted Critical
Publication of FR1520418A publication Critical patent/FR1520418A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR84944A 1965-11-25 1966-11-25 Microscope à émission électronique Expired FR1520418A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR84944A FR1520418A (fr) 1965-11-25 1966-11-25 Microscope à émission électronique

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CH1636765A CH455959A (de) 1965-11-25 1965-11-25 Elektronenemissionsmikroskop
FR84944A FR1520418A (fr) 1965-11-25 1966-11-25 Microscope à émission électronique
US60677567A 1967-01-03 1967-01-03

Publications (1)

Publication Number Publication Date
FR1520418A true FR1520418A (fr) 1968-04-12

Family

ID=27177459

Family Applications (1)

Application Number Title Priority Date Filing Date
FR84944A Expired FR1520418A (fr) 1965-11-25 1966-11-25 Microscope à émission électronique

Country Status (1)

Country Link
FR (1) FR1520418A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2130141A1 (fr) * 1971-03-16 1972-11-03 Jeol Ltd

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2130141A1 (fr) * 1971-03-16 1972-11-03 Jeol Ltd

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