GB1378667A - Ion implantation - Google Patents

Ion implantation

Info

Publication number
GB1378667A
GB1378667A GB3937872A GB3937872A GB1378667A GB 1378667 A GB1378667 A GB 1378667A GB 3937872 A GB3937872 A GB 3937872A GB 3937872 A GB3937872 A GB 3937872A GB 1378667 A GB1378667 A GB 1378667A
Authority
GB
United Kingdom
Prior art keywords
holder
ion
sample
ion implantation
aug
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3937872A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of GB1378667A publication Critical patent/GB1378667A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
GB3937872A 1971-08-24 1972-08-24 Ion implantation Expired GB1378667A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US17446371A 1971-08-24 1971-08-24

Publications (1)

Publication Number Publication Date
GB1378667A true GB1378667A (en) 1974-12-27

Family

ID=22636242

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3937872A Expired GB1378667A (en) 1971-08-24 1972-08-24 Ion implantation

Country Status (8)

Country Link
JP (1) JPS4830000A (enrdf_load_stackoverflow)
BE (1) BE787829A (enrdf_load_stackoverflow)
CA (1) CA953823A (enrdf_load_stackoverflow)
DE (1) DE2239284A1 (enrdf_load_stackoverflow)
FR (1) FR2151361A5 (enrdf_load_stackoverflow)
GB (1) GB1378667A (enrdf_load_stackoverflow)
IT (1) IT965998B (enrdf_load_stackoverflow)
NL (1) NL7211326A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58106823A (ja) * 1981-12-18 1983-06-25 Toshiba Corp イオン注入方法
JPS6110025A (ja) * 1984-06-23 1986-01-17 Toagosei Chem Ind Co Ltd 水溶液の精製法
US4929588A (en) * 1987-12-02 1990-05-29 Lithium Corporation Of America Sodium removal, from brines
US4859343A (en) * 1987-12-02 1989-08-22 Lithium Corporation Of America Sodium removal from brines
US5449916A (en) * 1994-09-09 1995-09-12 Atomic Energy Of Canada Limited Electron radiation dose tailoring by variable beam pulse generation

Also Published As

Publication number Publication date
IT965998B (it) 1974-02-11
CA953823A (en) 1974-08-27
BE787829A (fr) 1972-12-18
JPS4830000A (enrdf_load_stackoverflow) 1973-04-20
NL7211326A (enrdf_load_stackoverflow) 1973-02-27
FR2151361A5 (enrdf_load_stackoverflow) 1973-04-13
DE2239284A1 (de) 1973-03-08

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Legal Events

Date Code Title Description
CSNS Application of which complete specification have been accepted and published, but patent is not sealed