JPS51148451A - Basic position-error detection system - Google Patents
Basic position-error detection systemInfo
- Publication number
- JPS51148451A JPS51148451A JP50072295A JP7229575A JPS51148451A JP S51148451 A JPS51148451 A JP S51148451A JP 50072295 A JP50072295 A JP 50072295A JP 7229575 A JP7229575 A JP 7229575A JP S51148451 A JPS51148451 A JP S51148451A
- Authority
- JP
- Japan
- Prior art keywords
- basic position
- detection system
- error detection
- patterning
- spot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Optical Transform (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50072295A JPS51148451A (en) | 1975-06-14 | 1975-06-14 | Basic position-error detection system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50072295A JPS51148451A (en) | 1975-06-14 | 1975-06-14 | Basic position-error detection system |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51148451A true JPS51148451A (en) | 1976-12-20 |
Family
ID=13485119
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50072295A Pending JPS51148451A (en) | 1975-06-14 | 1975-06-14 | Basic position-error detection system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51148451A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5498268A (en) * | 1978-01-16 | 1979-08-03 | Ibm | Method of inspecting position |
JPS5821111A (en) * | 1981-07-29 | 1983-02-07 | Nippon Kogaku Kk <Nikon> | Positioning device for pattern detection |
JPS59163506A (en) * | 1983-03-09 | 1984-09-14 | Hitachi Ltd | Electronic beam measuring device |
-
1975
- 1975-06-14 JP JP50072295A patent/JPS51148451A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5498268A (en) * | 1978-01-16 | 1979-08-03 | Ibm | Method of inspecting position |
JPH0220921B2 (en) * | 1978-01-16 | 1990-05-11 | Intaanashonaru Bijinesu Mashiinzu Corp | |
JPS5821111A (en) * | 1981-07-29 | 1983-02-07 | Nippon Kogaku Kk <Nikon> | Positioning device for pattern detection |
JPS59163506A (en) * | 1983-03-09 | 1984-09-14 | Hitachi Ltd | Electronic beam measuring device |
JPH0349042B2 (en) * | 1983-03-09 | 1991-07-26 | Hitachi Ltd |
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