GB1376665A - Apparatus for pulling semoconductor crystals - Google Patents

Apparatus for pulling semoconductor crystals

Info

Publication number
GB1376665A
GB1376665A GB869272A GB869272A GB1376665A GB 1376665 A GB1376665 A GB 1376665A GB 869272 A GB869272 A GB 869272A GB 869272 A GB869272 A GB 869272A GB 1376665 A GB1376665 A GB 1376665A
Authority
GB
United Kingdom
Prior art keywords
crystal
shaft
float
growth
pulling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB869272A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP46009517A external-priority patent/JPS5126400B1/ja
Priority claimed from JP8883871A external-priority patent/JPS5210117B2/ja
Application filed by Sony Corp filed Critical Sony Corp
Publication of GB1376665A publication Critical patent/GB1376665A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/28—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using weight changes of the crystal or the melt, e.g. flotation methods

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
GB869272A 1971-02-25 1972-02-24 Apparatus for pulling semoconductor crystals Expired GB1376665A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP46009517A JPS5126400B1 (enExample) 1971-02-25 1971-02-25
JP8883871A JPS5210117B2 (enExample) 1971-11-08 1971-11-08

Publications (1)

Publication Number Publication Date
GB1376665A true GB1376665A (en) 1974-12-11

Family

ID=26344265

Family Applications (1)

Application Number Title Priority Date Filing Date
GB869272A Expired GB1376665A (en) 1971-02-25 1972-02-24 Apparatus for pulling semoconductor crystals

Country Status (6)

Country Link
CA (1) CA971085A (enExample)
DE (1) DE2208758C3 (enExample)
FR (1) FR2126434B1 (enExample)
GB (1) GB1376665A (enExample)
IT (1) IT947939B (enExample)
NL (1) NL162975C (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4565598A (en) * 1982-01-04 1986-01-21 The Commonwealth Of Australia Method and apparatus for controlling diameter in Czochralski crystal growth by measuring crystal weight and crystal-melt interface temperature

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1408658A (fr) * 1963-09-26 1965-08-13 Consortium Elektrochem Ind Procédé de réalisation et de régulation du mouvement de translation lors de la fabrication de masses formées de semi-conducteurs
US3493348A (en) * 1966-07-01 1970-02-03 Ibm Buoyant device in crystal growing
FR2038683A5 (en) * 1969-03-21 1971-01-08 Radiotechnique Compelec Single crystal growing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4565598A (en) * 1982-01-04 1986-01-21 The Commonwealth Of Australia Method and apparatus for controlling diameter in Czochralski crystal growth by measuring crystal weight and crystal-melt interface temperature

Also Published As

Publication number Publication date
FR2126434B1 (enExample) 1978-03-03
NL7202422A (enExample) 1972-08-29
DE2208758B2 (de) 1973-10-31
FR2126434A1 (enExample) 1972-10-06
IT947939B (it) 1973-05-30
CA971085A (en) 1975-07-15
NL162975B (nl) 1980-02-15
DE2208758C3 (de) 1974-06-06
DE2208758A1 (de) 1972-09-14
NL162975C (nl) 1980-07-15

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee