CA971085A - Apparatus for pulling up semiconductor crystals - Google Patents

Apparatus for pulling up semiconductor crystals

Info

Publication number
CA971085A
CA971085A CA135,457A CA135457A CA971085A CA 971085 A CA971085 A CA 971085A CA 135457 A CA135457 A CA 135457A CA 971085 A CA971085 A CA 971085A
Authority
CA
Canada
Prior art keywords
pulling
semiconductor crystals
crystals
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA135,457A
Other languages
English (en)
Other versions
CA135457S (en
Inventor
Yasuo Tamate
Toshihiko Suzuki
Kinji Hoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP46009517A external-priority patent/JPS5126400B1/ja
Priority claimed from JP8883871A external-priority patent/JPS5210117B2/ja
Application filed by Sony Corp filed Critical Sony Corp
Application granted granted Critical
Publication of CA971085A publication Critical patent/CA971085A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/28—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using weight changes of the crystal or the melt, e.g. flotation methods

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
CA135,457A 1971-02-25 1972-02-24 Apparatus for pulling up semiconductor crystals Expired CA971085A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP46009517A JPS5126400B1 (enExample) 1971-02-25 1971-02-25
JP8883871A JPS5210117B2 (enExample) 1971-11-08 1971-11-08

Publications (1)

Publication Number Publication Date
CA971085A true CA971085A (en) 1975-07-15

Family

ID=26344265

Family Applications (1)

Application Number Title Priority Date Filing Date
CA135,457A Expired CA971085A (en) 1971-02-25 1972-02-24 Apparatus for pulling up semiconductor crystals

Country Status (6)

Country Link
CA (1) CA971085A (enExample)
DE (1) DE2208758C3 (enExample)
FR (1) FR2126434B1 (enExample)
GB (1) GB1376665A (enExample)
IT (1) IT947939B (enExample)
NL (1) NL162975C (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1983002464A1 (en) * 1982-01-04 1983-07-21 Seymour, Robert, Stephen Diameter control in czochralski crystal growth

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1408658A (fr) * 1963-09-26 1965-08-13 Consortium Elektrochem Ind Procédé de réalisation et de régulation du mouvement de translation lors de la fabrication de masses formées de semi-conducteurs
US3493348A (en) * 1966-07-01 1970-02-03 Ibm Buoyant device in crystal growing
FR2038683A5 (en) * 1969-03-21 1971-01-08 Radiotechnique Compelec Single crystal growing apparatus

Also Published As

Publication number Publication date
DE2208758B2 (de) 1973-10-31
DE2208758A1 (de) 1972-09-14
NL162975C (nl) 1980-07-15
FR2126434B1 (enExample) 1978-03-03
DE2208758C3 (de) 1974-06-06
NL162975B (nl) 1980-02-15
GB1376665A (en) 1974-12-11
IT947939B (it) 1973-05-30
FR2126434A1 (enExample) 1972-10-06
NL7202422A (enExample) 1972-08-29

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