FR2038683A5 - Single crystal growing apparatus - Google Patents

Single crystal growing apparatus

Info

Publication number
FR2038683A5
FR2038683A5 FR6908346A FR6908346A FR2038683A5 FR 2038683 A5 FR2038683 A5 FR 2038683A5 FR 6908346 A FR6908346 A FR 6908346A FR 6908346 A FR6908346 A FR 6908346A FR 2038683 A5 FR2038683 A5 FR 2038683A5
Authority
FR
France
Prior art keywords
vibration
hollow body
slowly
single crystal
crystal growing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR6908346A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Radiotechnique Compelec RTC SA
Original Assignee
Radiotechnique Compelec RTC SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Radiotechnique Compelec RTC SA filed Critical Radiotechnique Compelec RTC SA
Priority to FR6908346A priority Critical patent/FR2038683A5/en
Application granted granted Critical
Publication of FR2038683A5 publication Critical patent/FR2038683A5/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/28—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using weight changes of the crystal or the melt, e.g. flotation methods

Abstract

Apparatus for growing semiconductor crystals by slowly displacing the end of the seed crystal upwards, simultaneously rotating it slowly, without shock or vibration, employs an annular hollow body floating on an annular tank supplied with water at a steady rate. The crystal is rotated by a motor attached to a rigid frame, supported on the annular hollow body, and attached by springs to outer supports and to an inertial mass suspended in a heavy fluid to damp out any sudden shock or vibration.
FR6908346A 1969-03-21 1969-03-21 Single crystal growing apparatus Expired FR2038683A5 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR6908346A FR2038683A5 (en) 1969-03-21 1969-03-21 Single crystal growing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR6908346A FR2038683A5 (en) 1969-03-21 1969-03-21 Single crystal growing apparatus

Publications (1)

Publication Number Publication Date
FR2038683A5 true FR2038683A5 (en) 1971-01-08

Family

ID=9031078

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6908346A Expired FR2038683A5 (en) 1969-03-21 1969-03-21 Single crystal growing apparatus

Country Status (1)

Country Link
FR (1) FR2038683A5 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2126434A1 (en) * 1971-02-25 1972-10-06 Sony Corp

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2126434A1 (en) * 1971-02-25 1972-10-06 Sony Corp

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Legal Events

Date Code Title Description
ST Notification of lapse