GB1375789A - - Google Patents

Info

Publication number
GB1375789A
GB1375789A GB1872572A GB1872572A GB1375789A GB 1375789 A GB1375789 A GB 1375789A GB 1872572 A GB1872572 A GB 1872572A GB 1872572 A GB1872572 A GB 1872572A GB 1375789 A GB1375789 A GB 1375789A
Authority
GB
United Kingdom
Prior art keywords
anode
supply
voltage
beam current
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1872572A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1375789A publication Critical patent/GB1375789A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V17/00—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages
    • F21V17/06—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages the fastening being onto or by the lampholder
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243—Beam current control or regulation circuits
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
    • H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions
    • H02H7/20—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for electronic equipment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
GB1872572A 1971-04-30 1972-04-21 Expired GB1375789A (enrdf_load_stackoverflow)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2875371 1971-04-30
JP5161071 1971-07-12

Publications (1)

Publication Number Publication Date
GB1375789A true GB1375789A (enrdf_load_stackoverflow) 1974-11-27

Family

ID=26366896

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1872572A Expired GB1375789A (enrdf_load_stackoverflow) 1971-04-30 1972-04-21

Country Status (4)

Country Link
US (1) US3825839A (enrdf_load_stackoverflow)
DE (2) DE2221138C3 (enrdf_load_stackoverflow)
FR (1) FR2134396B1 (enrdf_load_stackoverflow)
GB (1) GB1375789A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117850168A (zh) * 2023-11-28 2024-04-09 上海集成电路材料研究院有限公司 一种电子束直写装置

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT988681B (it) * 1972-07-03 1975-04-30 Ibm Sistema di controllo per dispo sitivi emettitori di elettroni
DE2325786C2 (de) * 1973-05-22 1983-10-06 Leybold-Heraeus Gmbh, 5000 Koeln Schaltung zur Regelung der Betriebsparameter eines Elektronenstrahlerzeugers
DE2325808C2 (de) * 1973-05-22 1983-07-14 Leybold-Heraeus GmbH, 5000 Köln Schaltung zur Regelung der Betriebsparameter eines Elektronenstrahlerzeugers
JPS5279757A (en) * 1975-12-26 1977-07-05 Hitachi Ltd Power supply for field emission electron gun
US4525652A (en) * 1982-10-23 1985-06-25 Leybold-Heraeus Gmbh Auxiliary-voltage source for supplying electric circuits which are at a high potential
US4588928A (en) * 1983-06-15 1986-05-13 At&T Bell Laboratories Electron emission system
US4687970A (en) * 1985-05-31 1987-08-18 Hughes Aircraft Company Digital cathode current control loop
US5401973A (en) * 1992-12-04 1995-03-28 Atomic Energy Of Canada Limited Industrial material processing electron linear accelerator
DE10031090A1 (de) * 2000-06-30 2002-01-31 Acl Lichttechnik Gmbh Reflektorleuchte mit Zwangskühlung des Leuchtmittels
US6847164B2 (en) 2002-12-10 2005-01-25 Applied Matrials, Inc. Current-stabilizing illumination of photocathode electron beam source
EP1760761B1 (en) * 2005-09-05 2017-10-18 ICT, Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam emitting device and method for operating a charged particle beam emitting device
WO2022263153A1 (en) * 2021-06-18 2022-12-22 Asml Netherlands B.V. System and method for adjusting beam current using a feedback loop in charged particle systems

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2384087A (en) * 1942-04-01 1945-09-04 Rca Corp Current limiter
US3377506A (en) * 1966-03-30 1968-04-09 United Aircraft Corp Electromagnetic current control for a hollow cathode
US3413517A (en) * 1967-01-13 1968-11-26 Ibm Filament current control by a superposed dithering voltage
SU490099A1 (ru) * 1968-07-17 1975-10-30 Московский Ордена Ленина Энергетический Институт Устройство дл автоматического регулировани электрического режима электротермической установки с электронной пушкой
NL7012758A (enrdf_load_stackoverflow) * 1970-08-28 1972-03-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117850168A (zh) * 2023-11-28 2024-04-09 上海集成电路材料研究院有限公司 一种电子束直写装置

Also Published As

Publication number Publication date
DE2221138B2 (de) 1976-06-16
DE221138C (enrdf_load_stackoverflow)
FR2134396B1 (enrdf_load_stackoverflow) 1976-08-06
US3825839A (en) 1974-07-23
DE2221138A1 (de) 1972-11-23
FR2134396A1 (enrdf_load_stackoverflow) 1972-12-08
DE2221138C3 (de) 1979-07-19

Similar Documents

Publication Publication Date Title
GB1375789A (enrdf_load_stackoverflow)
US4504776A (en) Power saving regulated light emitting diode circuit
US2350069A (en) Oscillograph sweep circuit
GB1486198A (en) Control apparatus including an electron emission tube
US3521067A (en) X-ray tube current stabilization
GB1214574A (en) Improvements in or relating to voltage current regulating circuits
GB1152863A (en) Method and device for Voltage Regulation
US4398132A (en) Electron beam current stabilizing device
US3936756A (en) Field emission electron gun having automatic current control
GB1068119A (en) Improvements in or relating to power supply apparatus
GB1175110A (en) Theatre Lighting Control
US5053680A (en) Switching device
GB796740A (en) Improvements in or relating to x-ray apparatus supply or control circuits
US3166721A (en) Regulated pulse modulator
GB1289566A (enrdf_load_stackoverflow)
JPS6412450A (en) Temperature control device for thermoelectric field radiation gun
GB1203944A (en) Method and apparatus for increasing and indicating filament life
US4013244A (en) Device for controlling the power of an optical guidance beam
GB1052220A (enrdf_load_stackoverflow)
US3233143A (en) Deflection circuit with vdr feedback means
GB1207357A (en) Improvements in or relating to recording devices
GB953004A (en) Supply and control system for electric discharge lamps
JPS5582535A (en) Automatic threshold value control circuit
SU406206A1 (ru) Л
GB1340092A (en) Channel plate image intensifier systems

Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee