GB1344972A - Vacuum deposition of chromium - Google Patents

Vacuum deposition of chromium

Info

Publication number
GB1344972A
GB1344972A GB4343172A GB4343172A GB1344972A GB 1344972 A GB1344972 A GB 1344972A GB 4343172 A GB4343172 A GB 4343172A GB 4343172 A GB4343172 A GB 4343172A GB 1344972 A GB1344972 A GB 1344972A
Authority
GB
United Kingdom
Prior art keywords
chromium
vacuum deposition
vapour
headings
sept
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4343172A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1344972A publication Critical patent/GB1344972A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB4343172A 1971-10-07 1972-09-20 Vacuum deposition of chromium Expired GB1344972A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US18747871A 1971-10-07 1971-10-07

Publications (1)

Publication Number Publication Date
GB1344972A true GB1344972A (en) 1974-01-23

Family

ID=22689163

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4343172A Expired GB1344972A (en) 1971-10-07 1972-09-20 Vacuum deposition of chromium

Country Status (4)

Country Link
JP (1) JPS4848334A (enrdf_load_stackoverflow)
DE (1) DE2248840A1 (enrdf_load_stackoverflow)
FR (1) FR2156005A1 (enrdf_load_stackoverflow)
GB (1) GB1344972A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1686635A1 (en) * 2005-01-31 2006-08-02 Samsung SDI Co., Ltd. Method of forming thin film and method of fabricating OLED
US7329436B2 (en) 2004-11-17 2008-02-12 United Technologies Corporation Vapor deposition of dissimilar materials

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2496703A1 (fr) * 1980-12-24 1982-06-25 Labo Electronique Physique Source d'evaporation de manganese sur substrat dans le vide, notamment sur substrat de couche photosensible dans un tube photo-electrique et procede de fabrication

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7329436B2 (en) 2004-11-17 2008-02-12 United Technologies Corporation Vapor deposition of dissimilar materials
US8286582B2 (en) 2004-11-17 2012-10-16 United Technologies Corporation Vapor deposition of dissimilar materials
EP1686635A1 (en) * 2005-01-31 2006-08-02 Samsung SDI Co., Ltd. Method of forming thin film and method of fabricating OLED
CN100440459C (zh) * 2005-01-31 2008-12-03 三星Sdi株式会社 形成薄膜的方法及制造有机光发射显示器件的方法

Also Published As

Publication number Publication date
DE2248840A1 (de) 1973-04-12
JPS4848334A (enrdf_load_stackoverflow) 1973-07-09
FR2156005A1 (enrdf_load_stackoverflow) 1973-05-25

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Legal Events

Date Code Title Description
CSNS Application of which complete specification have been accepted and published, but patent is not sealed