GB1334126A - Evaporation and or treatment of materials in ultra-high vacuum by electron beans - Google Patents

Evaporation and or treatment of materials in ultra-high vacuum by electron beans

Info

Publication number
GB1334126A
GB1334126A GB3433671A GB3433671A GB1334126A GB 1334126 A GB1334126 A GB 1334126A GB 3433671 A GB3433671 A GB 3433671A GB 3433671 A GB3433671 A GB 3433671A GB 1334126 A GB1334126 A GB 1334126A
Authority
GB
United Kingdom
Prior art keywords
cathode
electrode
auxiliary electrode
vaporizing
working
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3433671A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Publication of GB1334126A publication Critical patent/GB1334126A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
GB3433671A 1970-08-12 1971-07-22 Evaporation and or treatment of materials in ultra-high vacuum by electron beans Expired GB1334126A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1208870A CH516225A (de) 1970-08-12 1970-08-12 Verfahren zum Betrieb einer eine Elektronen emittierende Kathode und eine Hilfselektrode zur Strahlformung aufweisenden Einrichtung zur Verdampfung und/oder Bearbeitung von Materialien unter Ultrahochvakuum mittels eines Elektronenstrahls u nd Einrichtung zur Durchführung des Verfahrens

Publications (1)

Publication Number Publication Date
GB1334126A true GB1334126A (en) 1973-10-17

Family

ID=4379742

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3433671A Expired GB1334126A (en) 1970-08-12 1971-07-22 Evaporation and or treatment of materials in ultra-high vacuum by electron beans

Country Status (5)

Country Link
CH (1) CH516225A (enExample)
DE (1) DE2050651C3 (enExample)
FR (1) FR2101871A5 (enExample)
GB (1) GB1334126A (enExample)
NL (1) NL7014861A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2148049A (en) * 1983-10-14 1985-05-22 Multi Arc Vacuum Syst Physical vapor deposition apparatus
CN105826148A (zh) * 2016-04-14 2016-08-03 中国科学院电子学研究所 微波真空电子器件的零件除气方法、装置和系统

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2148049A (en) * 1983-10-14 1985-05-22 Multi Arc Vacuum Syst Physical vapor deposition apparatus
CN105826148A (zh) * 2016-04-14 2016-08-03 中国科学院电子学研究所 微波真空电子器件的零件除气方法、装置和系统

Also Published As

Publication number Publication date
DE2050651C3 (de) 1974-05-30
CH516225A (de) 1971-11-30
NL7014861A (enExample) 1972-02-15
DE2050651B2 (de) 1973-10-31
FR2101871A5 (enExample) 1972-03-31
DE2050651A1 (de) 1972-02-17

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees