FR2101871A5 - - Google Patents

Info

Publication number
FR2101871A5
FR2101871A5 FR7126624A FR7126624A FR2101871A5 FR 2101871 A5 FR2101871 A5 FR 2101871A5 FR 7126624 A FR7126624 A FR 7126624A FR 7126624 A FR7126624 A FR 7126624A FR 2101871 A5 FR2101871 A5 FR 2101871A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7126624A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Application granted granted Critical
Publication of FR2101871A5 publication Critical patent/FR2101871A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control
FR7126624A 1970-08-12 1971-07-21 Expired FR2101871A5 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1208870A CH516225A (de) 1970-08-12 1970-08-12 Verfahren zum Betrieb einer eine Elektronen emittierende Kathode und eine Hilfselektrode zur Strahlformung aufweisenden Einrichtung zur Verdampfung und/oder Bearbeitung von Materialien unter Ultrahochvakuum mittels eines Elektronenstrahls u nd Einrichtung zur Durchführung des Verfahrens

Publications (1)

Publication Number Publication Date
FR2101871A5 true FR2101871A5 (fr) 1972-03-31

Family

ID=4379742

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7126624A Expired FR2101871A5 (fr) 1970-08-12 1971-07-21

Country Status (5)

Country Link
CH (1) CH516225A (fr)
DE (1) DE2050651C3 (fr)
FR (1) FR2101871A5 (fr)
GB (1) GB1334126A (fr)
NL (1) NL7014861A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4556471A (en) * 1983-10-14 1985-12-03 Multi-Arc Vacuum Systems Inc. Physical vapor deposition apparatus
CN105826148A (zh) * 2016-04-14 2016-08-03 中国科学院电子学研究所 微波真空电子器件的零件除气方法、装置和系统

Also Published As

Publication number Publication date
DE2050651C3 (de) 1974-05-30
GB1334126A (en) 1973-10-17
DE2050651A1 (de) 1972-02-17
DE2050651B2 (de) 1973-10-31
CH516225A (de) 1971-11-30
NL7014861A (fr) 1972-02-15

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Legal Events

Date Code Title Description
ST Notification of lapse