NL7014861A - - Google Patents
Info
- Publication number
- NL7014861A NL7014861A NL7014861A NL7014861A NL7014861A NL 7014861 A NL7014861 A NL 7014861A NL 7014861 A NL7014861 A NL 7014861A NL 7014861 A NL7014861 A NL 7014861A NL 7014861 A NL7014861 A NL 7014861A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/302—Controlling tubes by external information, e.g. programme control
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH1208870A CH516225A (de) | 1970-08-12 | 1970-08-12 | Verfahren zum Betrieb einer eine Elektronen emittierende Kathode und eine Hilfselektrode zur Strahlformung aufweisenden Einrichtung zur Verdampfung und/oder Bearbeitung von Materialien unter Ultrahochvakuum mittels eines Elektronenstrahls u nd Einrichtung zur Durchführung des Verfahrens |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7014861A true NL7014861A (enExample) | 1972-02-15 |
Family
ID=4379742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7014861A NL7014861A (enExample) | 1970-08-12 | 1970-10-09 |
Country Status (5)
| Country | Link |
|---|---|
| CH (1) | CH516225A (enExample) |
| DE (1) | DE2050651C3 (enExample) |
| FR (1) | FR2101871A5 (enExample) |
| GB (1) | GB1334126A (enExample) |
| NL (1) | NL7014861A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4556471A (en) * | 1983-10-14 | 1985-12-03 | Multi-Arc Vacuum Systems Inc. | Physical vapor deposition apparatus |
| CN105826148A (zh) * | 2016-04-14 | 2016-08-03 | 中国科学院电子学研究所 | 微波真空电子器件的零件除气方法、装置和系统 |
-
1970
- 1970-08-12 CH CH1208870A patent/CH516225A/de not_active IP Right Cessation
- 1970-10-09 NL NL7014861A patent/NL7014861A/xx unknown
- 1970-10-15 DE DE19702050651 patent/DE2050651C3/de not_active Expired
-
1971
- 1971-07-21 FR FR7126624A patent/FR2101871A5/fr not_active Expired
- 1971-07-22 GB GB3433671A patent/GB1334126A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2050651C3 (de) | 1974-05-30 |
| CH516225A (de) | 1971-11-30 |
| GB1334126A (en) | 1973-10-17 |
| DE2050651B2 (de) | 1973-10-31 |
| FR2101871A5 (enExample) | 1972-03-31 |
| DE2050651A1 (de) | 1972-02-17 |