GB1331076A - Methods of manufacturing semiconductor components - Google Patents

Methods of manufacturing semiconductor components

Info

Publication number
GB1331076A
GB1331076A GB5984370A GB5984370A GB1331076A GB 1331076 A GB1331076 A GB 1331076A GB 5984370 A GB5984370 A GB 5984370A GB 5984370 A GB5984370 A GB 5984370A GB 1331076 A GB1331076 A GB 1331076A
Authority
GB
United Kingdom
Prior art keywords
marks
holograms
reference marks
hologram
photo
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5984370A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19691963787 external-priority patent/DE1963787C3/de
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of GB1331076A publication Critical patent/GB1331076A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • H10P76/2042—Photolithographic processes using lasers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W46/00—Marks applied to devices, e.g. for alignment or identification
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/0005—Adaptation of holography to specific applications
    • G03H2001/0094—Adaptation of holography to specific applications for patterning or machining using the holobject as input light distribution
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W46/00—Marks applied to devices, e.g. for alignment or identification
    • H10W46/501—Marks applied to devices, e.g. for alignment or identification for use before dicing

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Holo Graphy (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
GB5984370A 1969-12-19 1970-12-17 Methods of manufacturing semiconductor components Expired GB1331076A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691963787 DE1963787C3 (de) 1969-12-19 Verfahren zur Herstellung von Halbleiterbauelementen mit holographischer Projektion der Ätzmuster und Anordnung hierfür

Publications (1)

Publication Number Publication Date
GB1331076A true GB1331076A (en) 1973-09-19

Family

ID=5754409

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5984370A Expired GB1331076A (en) 1969-12-19 1970-12-17 Methods of manufacturing semiconductor components

Country Status (8)

Country Link
US (1) US3712813A (enExample)
JP (1) JPS514829B1 (enExample)
AT (1) AT323808B (enExample)
CH (1) CH518624A (enExample)
FR (1) FR2073484B1 (enExample)
GB (1) GB1331076A (enExample)
NL (1) NL7018442A (enExample)
SE (1) SE356637B (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2176628A (en) * 1985-06-06 1986-12-31 Gillian Margaret Davis Apparatus for the production of high resolution images
GB2193344A (en) * 1986-06-30 1988-02-03 Hugle William Bell Integrated circuits using holographic techniques
RU2262126C1 (ru) * 2004-08-20 2005-10-10 Иванова Наталия Викторовна Способ получения изображения на чувствительном к используемому излучению материале, способ получения бинарной голограммы (варианты) и способ получения изображения с использованием голограммы
US7312021B2 (en) 2004-01-07 2007-12-25 Taiwan Semiconductor Manufacturing Company, Ltd. Holographic reticle and patterning method
RU2396584C1 (ru) * 2009-07-22 2010-08-10 Вадим Израилович Раховский Способ изготовления голографических изображений рисунка
RU2486561C1 (ru) * 2011-12-21 2013-06-27 Вадим Израилович Раховский Способ изготовления голографических изображений рисунка
US8758963B2 (en) 2004-01-07 2014-06-24 Taiwan Semiconductor Manufacturing Company, Ltd. Holographic reticle and patterning method

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4835088A (en) * 1987-12-22 1989-05-30 Submicron Structures, Inc. Method and apparatus for generating high-resolution images
GB2221353A (en) * 1988-07-25 1990-01-31 Gen Hybrid Limited Manufacturing electrical circuits
GB8908871D0 (en) * 1989-04-19 1989-06-07 Hugle William B Manufacture of flat panel displays
DE4124203A1 (de) * 1991-07-20 1993-01-21 Krupp Ag Holographische messmarken
US5455850A (en) * 1991-11-01 1995-10-03 The Regents Of The Univerity Of Calif. X-ray lithography using holographic images
US5438441A (en) * 1991-11-29 1995-08-01 General Electric Company Method and apparatus for material processing with a laser controlled by a holographic element
DE4338774A1 (de) * 1993-11-12 1995-05-18 Baasel Carl Lasertech Vorrichtung zum Beschriften von Werkstücken
US5606434A (en) * 1994-06-30 1997-02-25 University Of North Carolina Achromatic optical system including diffractive optical element
CA2271815C (en) * 1996-11-15 2010-01-19 Diffraction Ltd. In-line holographic mask for micromachining
JP4022398B2 (ja) * 2001-12-27 2007-12-19 株式会社 液晶先端技術開発センター 位相シフトマスクの作成方法及び装置
EP1616344B1 (de) * 2003-04-13 2008-08-13 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Räumlich hochaufgelöstes erzeugen einer dauerhaften struktur
US7539115B2 (en) * 2003-04-13 2009-05-26 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Creating a permanent structure with high spatial resolution
US7064824B2 (en) * 2003-04-13 2006-06-20 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. High spatial resoulution imaging and modification of structures
JP4333760B2 (ja) * 2007-03-23 2009-09-16 セイコーエプソン株式会社 ホログラム素子、照明装置及びプロジェクタ
US20150147684A1 (en) * 2013-11-22 2015-05-28 Wasatch Photonics, Inc. System and method for holography-based fabrication

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1542515A (fr) * 1966-07-21 1968-09-09 Ibm Montage à réglage automatique servant à réaliser un cadrage optique
FR1532389A (fr) * 1967-05-10 1968-07-12 Comp Generale Electricite Dispositif fournissant une image repère dans un appareil d'optique

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2176628A (en) * 1985-06-06 1986-12-31 Gillian Margaret Davis Apparatus for the production of high resolution images
GB2176628B (en) * 1985-06-06 1989-07-05 Gillian Margaret Davis Method and apparatus for the production of high resolution images
GB2193344A (en) * 1986-06-30 1988-02-03 Hugle William Bell Integrated circuits using holographic techniques
US4857425A (en) * 1986-06-30 1989-08-15 Holtronic Technologies Limited Manufacture of integrated circuits using holographic techniques
GB2193344B (en) * 1986-06-30 1990-08-29 Hugle William Bell "the manufacture of intergrated circuits using holographic techniques".
US7312021B2 (en) 2004-01-07 2007-12-25 Taiwan Semiconductor Manufacturing Company, Ltd. Holographic reticle and patterning method
US8758963B2 (en) 2004-01-07 2014-06-24 Taiwan Semiconductor Manufacturing Company, Ltd. Holographic reticle and patterning method
RU2262126C1 (ru) * 2004-08-20 2005-10-10 Иванова Наталия Викторовна Способ получения изображения на чувствительном к используемому излучению материале, способ получения бинарной голограммы (варианты) и способ получения изображения с использованием голограммы
WO2006025760A3 (en) * 2004-08-20 2006-09-14 Natalja Viktorovna Ivanova Method for producing an image on a material sensitive to a used radiation, method for obtaining a binary hologram (variants) and methods for producing an image by using said hologram
RU2396584C1 (ru) * 2009-07-22 2010-08-10 Вадим Израилович Раховский Способ изготовления голографических изображений рисунка
RU2486561C1 (ru) * 2011-12-21 2013-06-27 Вадим Израилович Раховский Способ изготовления голографических изображений рисунка

Also Published As

Publication number Publication date
AT323808B (de) 1975-07-25
JPS514829B1 (enExample) 1976-02-14
NL7018442A (enExample) 1971-06-22
DE1963787B2 (de) 1977-05-12
CH518624A (de) 1972-01-31
SE356637B (enExample) 1973-05-28
US3712813A (en) 1973-01-23
FR2073484A1 (enExample) 1971-10-01
FR2073484B1 (enExample) 1975-07-04
DE1963787A1 (de) 1971-06-24

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee