CH518624A - Verfahren zur Herstellung von Halbleiterbauelementen mit holographischer Projektion der Ätzmuster und Anordnung hierfür - Google Patents

Verfahren zur Herstellung von Halbleiterbauelementen mit holographischer Projektion der Ätzmuster und Anordnung hierfür

Info

Publication number
CH518624A
CH518624A CH1851070A CH1851070A CH518624A CH 518624 A CH518624 A CH 518624A CH 1851070 A CH1851070 A CH 1851070A CH 1851070 A CH1851070 A CH 1851070A CH 518624 A CH518624 A CH 518624A
Authority
CH
Switzerland
Prior art keywords
production
semiconductor components
holographic projection
etched pattern
arrangement therefor
Prior art date
Application number
CH1851070A
Other languages
English (en)
Inventor
Dieter Dr Roess
Horst Dr Kiemle
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19691963787 external-priority patent/DE1963787C3/de
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH518624A publication Critical patent/CH518624A/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • H01L21/0275—Photolithographic processes using lasers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/0005—Adaptation of holography to specific applications
    • G03H2001/0094—Adaptation of holography to specific applications for patterning or machining using the holobject as input light distribution
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/544—Marks applied to semiconductor devices or parts
    • H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Holo Graphy (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
CH1851070A 1969-12-19 1970-12-14 Verfahren zur Herstellung von Halbleiterbauelementen mit holographischer Projektion der Ätzmuster und Anordnung hierfür CH518624A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19691963787 DE1963787C3 (de) 1969-12-19 Verfahren zur Herstellung von Halbleiterbauelementen mit holographischer Projektion der Ätzmuster und Anordnung hierfür

Publications (1)

Publication Number Publication Date
CH518624A true CH518624A (de) 1972-01-31

Family

ID=5754409

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1851070A CH518624A (de) 1969-12-19 1970-12-14 Verfahren zur Herstellung von Halbleiterbauelementen mit holographischer Projektion der Ätzmuster und Anordnung hierfür

Country Status (8)

Country Link
US (1) US3712813A (de)
JP (1) JPS514829B1 (de)
AT (1) AT323808B (de)
CH (1) CH518624A (de)
FR (1) FR2073484B1 (de)
GB (1) GB1331076A (de)
NL (1) NL7018442A (de)
SE (1) SE356637B (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8514261D0 (en) * 1985-06-06 1985-07-10 Davis G M Production of high resolution images
GB8615908D0 (en) * 1986-06-30 1986-08-06 Hugle W B Integrated circuits
US4835088A (en) * 1987-12-22 1989-05-30 Submicron Structures, Inc. Method and apparatus for generating high-resolution images
GB2221353A (en) * 1988-07-25 1990-01-31 Gen Hybrid Limited Manufacturing electrical circuits
GB8908871D0 (en) * 1989-04-19 1989-06-07 Hugle William B Manufacture of flat panel displays
DE4124203A1 (de) * 1991-07-20 1993-01-21 Krupp Ag Holographische messmarken
US5455850A (en) * 1991-11-01 1995-10-03 The Regents Of The Univerity Of Calif. X-ray lithography using holographic images
US5438441A (en) * 1991-11-29 1995-08-01 General Electric Company Method and apparatus for material processing with a laser controlled by a holographic element
DE4338774A1 (de) * 1993-11-12 1995-05-18 Baasel Carl Lasertech Vorrichtung zum Beschriften von Werkstücken
US5606434A (en) * 1994-06-30 1997-02-25 University Of North Carolina Achromatic optical system including diffractive optical element
CA2271815C (en) 1996-11-15 2010-01-19 Diffraction Ltd. In-line holographic mask for micromachining
JP4022398B2 (ja) * 2001-12-27 2007-12-19 株式会社 液晶先端技術開発センター 位相シフトマスクの作成方法及び装置
US7539115B2 (en) * 2003-04-13 2009-05-26 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Creating a permanent structure with high spatial resolution
US7064824B2 (en) * 2003-04-13 2006-06-20 Max-Planck-Gesellschaft Zur Forderung Der Wissenschaften E.V. High spatial resoulution imaging and modification of structures
EP1616344B1 (de) * 2003-04-13 2008-08-13 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Räumlich hochaufgelöstes erzeugen einer dauerhaften struktur
US7312021B2 (en) * 2004-01-07 2007-12-25 Taiwan Semiconductor Manufacturing Company, Ltd. Holographic reticle and patterning method
US8227150B2 (en) * 2004-01-07 2012-07-24 Taiwan Semiconductor Manufacturing Company, Ltd. Holographic reticle and patterning method
RU2262126C1 (ru) * 2004-08-20 2005-10-10 Иванова Наталия Викторовна Способ получения изображения на чувствительном к используемому излучению материале, способ получения бинарной голограммы (варианты) и способ получения изображения с использованием голограммы
JP4333760B2 (ja) * 2007-03-23 2009-09-16 セイコーエプソン株式会社 ホログラム素子、照明装置及びプロジェクタ
RU2486561C1 (ru) * 2011-12-21 2013-06-27 Вадим Израилович Раховский Способ изготовления голографических изображений рисунка
US20160291542A1 (en) * 2013-11-22 2016-10-06 Wasatch Photonics, Inc. System and method for holography-based fabrication

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1542515A (fr) * 1966-07-21 Ibm Montage à réglage automatique servant à réaliser un cadrage optique
FR1532389A (fr) * 1967-05-10 1968-07-12 Comp Generale Electricite Dispositif fournissant une image repère dans un appareil d'optique

Also Published As

Publication number Publication date
GB1331076A (en) 1973-09-19
JPS514829B1 (de) 1976-02-14
DE1963787B2 (de) 1977-05-12
DE1963787A1 (de) 1971-06-24
FR2073484A1 (de) 1971-10-01
NL7018442A (de) 1971-06-22
FR2073484B1 (de) 1975-07-04
AT323808B (de) 1975-07-25
US3712813A (en) 1973-01-23
SE356637B (de) 1973-05-28

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