GB1315011A - Thin film coils and method and apparatus for making the same - Google Patents
Thin film coils and method and apparatus for making the sameInfo
- Publication number
- GB1315011A GB1315011A GB4085670A GB4085670A GB1315011A GB 1315011 A GB1315011 A GB 1315011A GB 4085670 A GB4085670 A GB 4085670A GB 4085670 A GB4085670 A GB 4085670A GB 1315011 A GB1315011 A GB 1315011A
- Authority
- GB
- United Kingdom
- Prior art keywords
- masks
- heated
- making
- thin film
- same
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 title 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 238000004544 sputter deposition Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052804 chromium Inorganic materials 0.000 abstract 1
- 239000011651 chromium Substances 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000010891 electric arc Methods 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 230000006698 induction Effects 0.000 abstract 1
- 239000011810 insulating material Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910052759 nickel Inorganic materials 0.000 abstract 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- GOBHMYHEFKUOKK-UHFFFAOYSA-N silver tantalum Chemical compound [Ag][Ta] GOBHMYHEFKUOKK-UHFFFAOYSA-N 0.000 abstract 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Coils Or Transformers For Communication (AREA)
- Manufacturing Cores, Coils, And Magnets (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US1715770A | 1970-03-06 | 1970-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1315011A true GB1315011A (en) | 1973-04-26 |
Family
ID=21781041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB4085670A Expired GB1315011A (en) | 1970-03-06 | 1970-08-25 | Thin film coils and method and apparatus for making the same |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3785046A (enrdf_load_stackoverflow) |
| JP (1) | JPS5036013B1 (enrdf_load_stackoverflow) |
| CA (1) | CA919787A (enrdf_load_stackoverflow) |
| GB (1) | GB1315011A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7909351A (nl) * | 1978-12-28 | 1980-07-01 | Tdk Electronics Co Ltd | Gelaagd elektronisch deel evenals werkwijze ter vervaardiging daarvan. |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4342143A (en) * | 1974-02-04 | 1982-08-03 | Jennings Thomas A | Method of making multiple electrical components in integrated microminiature form |
| US4041896A (en) * | 1975-05-12 | 1977-08-16 | Ncr Corporation | Microelectronic circuit coating system |
| US4152679A (en) * | 1977-11-14 | 1979-05-01 | Hull Corporation | Microminiature electrical delay line utilizing thin film inductor array with magnetic enhancement and coupling |
| NL7900244A (nl) * | 1979-01-12 | 1980-07-15 | Philips Nv | Vlakke tweelaags electrische spoel. |
| NL7900245A (nl) * | 1979-01-12 | 1980-07-15 | Philips Nv | Tweelaags vlakke electrische spoel met aftakking. |
| JPS6028113Y2 (ja) * | 1980-05-29 | 1985-08-26 | ティーディーケイ株式会社 | トリミングが可能な複合部品 |
| JPS6011611Y2 (ja) * | 1980-06-13 | 1985-04-17 | ティーディーケイ株式会社 | 積層トランス |
| US4486641A (en) * | 1981-12-21 | 1984-12-04 | Ruffini Robert S | Inductor, coating and method |
| CA1202383A (en) * | 1983-03-25 | 1986-03-25 | Herman R. Person | Thick film delay line |
| DE3741706A1 (de) * | 1987-12-09 | 1989-06-22 | Asea Brown Boveri | Verfahren zur herstellung von spiralfoermigen duennfilm-flachspulen |
| US5418811A (en) * | 1992-04-08 | 1995-05-23 | Fluxtrol Manufacturing, Inc. | High performance induction melting coil |
| DE4223349A1 (de) * | 1992-07-16 | 1994-01-20 | Bosch Gmbh Robert | Winkelgeschwindigkeitssensor |
| US6549112B1 (en) * | 1996-08-29 | 2003-04-15 | Raytheon Company | Embedded vertical solenoid inductors for RF high power application |
| US5942965A (en) * | 1996-09-13 | 1999-08-24 | Murata Manufacturing Co., Ltd. | Multilayer substrate |
| US6005467A (en) * | 1997-02-11 | 1999-12-21 | Pulse Engineering, Inc. | Trimmable inductor |
| US6342681B1 (en) | 1997-10-15 | 2002-01-29 | Avx Corporation | Surface mount coupler device |
| US6566731B2 (en) * | 1999-02-26 | 2003-05-20 | Micron Technology, Inc. | Open pattern inductor |
| US6480086B1 (en) | 1999-12-20 | 2002-11-12 | Advanced Micro Devices, Inc. | Inductor and transformer formed with multi-layer coil turns fabricated on an integrated circuit substrate |
| US6901654B2 (en) * | 2000-01-10 | 2005-06-07 | Microstrain, Inc. | Method of fabricating a coil and clamp for variable reluctance transducer |
| JP4381417B2 (ja) * | 2004-11-25 | 2009-12-09 | 株式会社村田製作所 | コイル部品 |
| KR100756038B1 (ko) * | 2005-10-26 | 2007-09-07 | 삼성전자주식회사 | 멀티루프형 트랜스포머 |
| CN102667640B (zh) | 2010-06-11 | 2015-02-04 | 株式会社理光 | 信息存储装置、可拆卸装置、显影剂容器和成像设备 |
| US11569340B2 (en) | 2019-03-12 | 2023-01-31 | Analog Devices, Inc. | Fully symmetrical laterally coupled transformer for signal and power isolation |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2542726A (en) * | 1945-06-30 | 1951-02-20 | Herbert W Sullivan | Method of forming inductor coils |
| US3431144A (en) * | 1963-12-26 | 1969-03-04 | Nippon Electric Co | Method for manufacturing microminiature coils |
-
1970
- 1970-03-06 US US00017157A patent/US3785046A/en not_active Expired - Lifetime
- 1970-08-25 GB GB4085670A patent/GB1315011A/en not_active Expired
- 1970-09-09 CA CA092705A patent/CA919787A/en not_active Expired
- 1970-12-22 JP JP45116574A patent/JPS5036013B1/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7909351A (nl) * | 1978-12-28 | 1980-07-01 | Tdk Electronics Co Ltd | Gelaagd elektronisch deel evenals werkwijze ter vervaardiging daarvan. |
Also Published As
| Publication number | Publication date |
|---|---|
| CA919787A (en) | 1973-01-23 |
| US3785046A (en) | 1974-01-15 |
| JPS5036013B1 (enrdf_load_stackoverflow) | 1975-11-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |