GB1312464A - Method of preventing a chemical reaction between aluminium and silicon dioxide in a semiconductor device - Google Patents

Method of preventing a chemical reaction between aluminium and silicon dioxide in a semiconductor device

Info

Publication number
GB1312464A
GB1312464A GB4318570A GB4318570A GB1312464A GB 1312464 A GB1312464 A GB 1312464A GB 4318570 A GB4318570 A GB 4318570A GB 4318570 A GB4318570 A GB 4318570A GB 1312464 A GB1312464 A GB 1312464A
Authority
GB
United Kingdom
Prior art keywords
aluminium
alumina
reaction
silica
preventing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4318570A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of GB1312464A publication Critical patent/GB1312464A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/43—Encapsulations, e.g. protective coatings characterised by their materials comprising oxides, nitrides or carbides, e.g. ceramics or glasses
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
GB4318570A 1969-09-25 1970-09-09 Method of preventing a chemical reaction between aluminium and silicon dioxide in a semiconductor device Expired GB1312464A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US86098369A 1969-09-25 1969-09-25

Publications (1)

Publication Number Publication Date
GB1312464A true GB1312464A (en) 1973-04-04

Family

ID=25334551

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4318570A Expired GB1312464A (en) 1969-09-25 1970-09-09 Method of preventing a chemical reaction between aluminium and silicon dioxide in a semiconductor device

Country Status (5)

Country Link
JP (1) JPS4814633B1 (enExample)
BE (1) BE756685A (enExample)
DE (1) DE2045633A1 (enExample)
FR (1) FR2062559A5 (enExample)
GB (1) GB1312464A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5027447U (enExample) * 1973-07-03 1975-03-29
JPS50134041U (enExample) * 1974-04-18 1975-11-05
JPS50134040U (enExample) * 1974-04-18 1975-11-05
US4433004A (en) * 1979-07-11 1984-02-21 Tokyo Shibaura Denki Kabushiki Kaisha Semiconductor device and a method for manufacturing the same
JPS5643742A (en) * 1979-09-17 1981-04-22 Mitsubishi Electric Corp Manufacture of semiconductor
US4381595A (en) * 1979-10-09 1983-05-03 Mitsubishi Denki Kabushiki Kaisha Process for preparing multilayer interconnection

Also Published As

Publication number Publication date
JPS4814633B1 (enExample) 1973-05-09
FR2062559A5 (enExample) 1971-06-25
DE2045633A1 (de) 1971-05-13
BE756685A (fr) 1971-03-25

Similar Documents

Publication Publication Date Title
JPS55163860A (en) Manufacture of semiconductor device
GB1523677A (en) Semiconductor device and a method for manufacturing the same
GB1291683A (en) Semiconductor device having a passivating film
GB1400313A (en) Method of producing semiconductor device
ES480925A1 (es) Un proceso para incorporar pistas de aluminio sobre un cuer-po semiconductor.
GB1428713A (en) Method of manufactruing a semiconductor device
GB1418969A (en) Method of making integrated circuits
GB967002A (en) Improvements in or relating to semiconductor devices
US3980508A (en) Process of producing semiconductor device
GB1530085A (en) Semiconductor device manufacture
GB1206502A (en) Integrated graetz rectifier arrangement
DE3371140D1 (en) Fabricating a semiconductor device by means of molecular beam epitaxy
US3832230A (en) Method for improving glass adherence to gold film
GB1088679A (en) Improvements in or relating to electrical circuits
JPS5748249A (en) Semiconductor device
JPS5233490A (en) Manufacturing process of semiconductor device
JPS5331964A (en) Production of semiconductor substrates
JPS57145340A (en) Manufacture of semiconductor device
JPS5513904A (en) Semiconductor device and its manufacturing method
JPS52131484A (en) Semiconductor device
GB1348811A (en) Production of schottky contacts
GB1211657A (en) Metal etching process for semiconductor devices
JPS5846653A (ja) 半導体装置
JPS5763842A (en) Preparation of semiconductor integrated circuit
EP0056737A3 (en) Method of manufacturing a semiconductor device using molecular beam epitaxy

Legal Events

Date Code Title Description
CSNS Application of which complete specification have been accepted and published, but patent is not sealed