GB1299837A - Method of producing electrical interconnection patterns - Google Patents

Method of producing electrical interconnection patterns

Info

Publication number
GB1299837A
GB1299837A GB55959/71A GB5595971A GB1299837A GB 1299837 A GB1299837 A GB 1299837A GB 55959/71 A GB55959/71 A GB 55959/71A GB 5595971 A GB5595971 A GB 5595971A GB 1299837 A GB1299837 A GB 1299837A
Authority
GB
United Kingdom
Prior art keywords
layer
track pattern
coating
mask
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB55959/71A
Other languages
English (en)
Inventor
Rudolf August Herbert Heinecke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STC PLC
Original Assignee
Standard Telephone and Cables PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Standard Telephone and Cables PLC filed Critical Standard Telephone and Cables PLC
Priority to GB55959/71A priority Critical patent/GB1299837A/en
Priority to ZA727342A priority patent/ZA727342B/xx
Priority to DE2257201A priority patent/DE2257201A1/de
Priority to FR7242337A priority patent/FR2162038B1/fr
Publication of GB1299837A publication Critical patent/GB1299837A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/02—Local etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Drying Of Semiconductors (AREA)
GB55959/71A 1971-12-02 1971-12-02 Method of producing electrical interconnection patterns Expired GB1299837A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB55959/71A GB1299837A (en) 1971-12-02 1971-12-02 Method of producing electrical interconnection patterns
ZA727342A ZA727342B (en) 1971-12-02 1972-10-16 Method of producing electrical interconnection patterns
DE2257201A DE2257201A1 (de) 1971-12-02 1972-11-22 Verfahren zum herstellen eines elektrischen zwischenverbindungs-leiterzugmusters
FR7242337A FR2162038B1 (enrdf_load_stackoverflow) 1971-12-02 1972-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB55959/71A GB1299837A (en) 1971-12-02 1971-12-02 Method of producing electrical interconnection patterns

Publications (1)

Publication Number Publication Date
GB1299837A true GB1299837A (en) 1972-12-13

Family

ID=10475337

Family Applications (1)

Application Number Title Priority Date Filing Date
GB55959/71A Expired GB1299837A (en) 1971-12-02 1971-12-02 Method of producing electrical interconnection patterns

Country Status (4)

Country Link
DE (1) DE2257201A1 (enrdf_load_stackoverflow)
FR (1) FR2162038B1 (enrdf_load_stackoverflow)
GB (1) GB1299837A (enrdf_load_stackoverflow)
ZA (1) ZA727342B (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2088595A5 (enrdf_load_stackoverflow) * 1970-04-17 1972-01-07 Cii
US3700508A (en) * 1970-06-25 1972-10-24 Gen Instrument Corp Fabrication of integrated microcircuit devices

Also Published As

Publication number Publication date
ZA727342B (en) 1973-06-27
FR2162038B1 (enrdf_load_stackoverflow) 1976-04-23
FR2162038A1 (enrdf_load_stackoverflow) 1973-07-13
DE2257201A1 (de) 1973-06-14

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Legal Events

Date Code Title Description
PS Patent sealed
746 Register noted 'licences of right' (sect. 46/1977)
PCNP Patent ceased through non-payment of renewal fee