FR2162038A1 - - Google Patents
Info
- Publication number
- FR2162038A1 FR2162038A1 FR7242337A FR7242337A FR2162038A1 FR 2162038 A1 FR2162038 A1 FR 2162038A1 FR 7242337 A FR7242337 A FR 7242337A FR 7242337 A FR7242337 A FR 7242337A FR 2162038 A1 FR2162038 A1 FR 2162038A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB55959/71A GB1299837A (en) | 1971-12-02 | 1971-12-02 | Method of producing electrical interconnection patterns |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2162038A1 true FR2162038A1 (enrdf_load_stackoverflow) | 1973-07-13 |
| FR2162038B1 FR2162038B1 (enrdf_load_stackoverflow) | 1976-04-23 |
Family
ID=10475337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7242337A Expired FR2162038B1 (enrdf_load_stackoverflow) | 1971-12-02 | 1972-11-29 |
Country Status (4)
| Country | Link |
|---|---|
| DE (1) | DE2257201A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2162038B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1299837A (enrdf_load_stackoverflow) |
| ZA (1) | ZA727342B (enrdf_load_stackoverflow) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2088595A5 (enrdf_load_stackoverflow) * | 1970-04-17 | 1972-01-07 | Cii | |
| US3700508A (en) * | 1970-06-25 | 1972-10-24 | Gen Instrument Corp | Fabrication of integrated microcircuit devices |
-
1971
- 1971-12-02 GB GB55959/71A patent/GB1299837A/en not_active Expired
-
1972
- 1972-10-16 ZA ZA727342A patent/ZA727342B/xx unknown
- 1972-11-22 DE DE2257201A patent/DE2257201A1/de active Pending
- 1972-11-29 FR FR7242337A patent/FR2162038B1/fr not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2088595A5 (enrdf_load_stackoverflow) * | 1970-04-17 | 1972-01-07 | Cii | |
| US3700508A (en) * | 1970-06-25 | 1972-10-24 | Gen Instrument Corp | Fabrication of integrated microcircuit devices |
Non-Patent Citations (4)
| Title |
|---|
| "SOME RELIABILITY CONSIDERATIONS PERTAINING TO LSI TECHNOLOGY", M.M. SCHLACTER ET AL, PAGES 327-334.) * |
| "UNTERSUCHUNG VON HALBLEITERBAUELEMENTEN MIT DEM RASTERELEKTRONENMIKROSKOP", W. EBERHARDT ET AL, PAGES 315-321. * |
| REVUE DT "SIEMENS FORSCH, UND ENTWICKL.-BERICHTE", BD. 1, 1972, NO. 3 * |
| REVUE US "IEEE JOURNAL OF SOLID-STATE CIRCUITS", VOL. SC-6 OCTOBRE 1971 * |
Also Published As
| Publication number | Publication date |
|---|---|
| ZA727342B (en) | 1973-06-27 |
| GB1299837A (en) | 1972-12-13 |
| FR2162038B1 (enrdf_load_stackoverflow) | 1976-04-23 |
| DE2257201A1 (de) | 1973-06-14 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |