GB1283004A - Monitoring diffusion processes in the manufacture of semiconductor devices - Google Patents

Monitoring diffusion processes in the manufacture of semiconductor devices

Info

Publication number
GB1283004A
GB1283004A GB04189/71A GB1418971A GB1283004A GB 1283004 A GB1283004 A GB 1283004A GB 04189/71 A GB04189/71 A GB 04189/71A GB 1418971 A GB1418971 A GB 1418971A GB 1283004 A GB1283004 A GB 1283004A
Authority
GB
United Kingdom
Prior art keywords
transistors
mean
semiconductor devices
equation
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB04189/71A
Other languages
English (en)
Inventor
Horst Heinz Berger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1283004A publication Critical patent/GB1283004A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G01R31/2637—Circuits therefor for testing other individual devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Bipolar Transistors (AREA)
GB04189/71A 1970-06-04 1971-05-11 Monitoring diffusion processes in the manufacture of semiconductor devices Expired GB1283004A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702027459 DE2027459A1 (de) 1970-06-04 1970-06-04 Verfahren zur Kontrolle von Diffusions

Publications (1)

Publication Number Publication Date
GB1283004A true GB1283004A (en) 1972-07-26

Family

ID=5773017

Family Applications (1)

Application Number Title Priority Date Filing Date
GB04189/71A Expired GB1283004A (en) 1970-06-04 1971-05-11 Monitoring diffusion processes in the manufacture of semiconductor devices

Country Status (3)

Country Link
DE (1) DE2027459A1 (cg-RX-API-DMAC7.html)
FR (1) FR2094024B1 (cg-RX-API-DMAC7.html)
GB (1) GB1283004A (cg-RX-API-DMAC7.html)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3487276A (en) * 1966-11-15 1969-12-30 Westinghouse Electric Corp Thyristor having improved operating characteristics at high temperature

Also Published As

Publication number Publication date
FR2094024B1 (cg-RX-API-DMAC7.html) 1974-09-27
DE2027459A1 (de) 1971-12-16
FR2094024A1 (cg-RX-API-DMAC7.html) 1972-02-04

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees