GB1265545A - - Google Patents
Info
- Publication number
- GB1265545A GB1265545A GB1265545DA GB1265545A GB 1265545 A GB1265545 A GB 1265545A GB 1265545D A GB1265545D A GB 1265545DA GB 1265545 A GB1265545 A GB 1265545A
- Authority
- GB
- United Kingdom
- Prior art keywords
- source
- heated
- metal
- june
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 abstract 3
- 239000002184 metal Substances 0.000 abstract 3
- 239000000758 substrate Substances 0.000 abstract 3
- 229910018487 Ni—Cr Inorganic materials 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 2
- 238000000576 coating method Methods 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 2
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000010894 electron beam technology Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 230000004048 modification Effects 0.000 abstract 1
- 238000012986 modification Methods 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 239000010937 tungsten Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US73940768A | 1968-06-24 | 1968-06-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1265545A true GB1265545A (enrdf_load_stackoverflow) | 1972-03-01 |
Family
ID=24972148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1265545D Expired GB1265545A (enrdf_load_stackoverflow) | 1968-06-24 | 1969-06-11 |
Country Status (4)
| Country | Link |
|---|---|
| DE (1) | DE1930951A1 (enrdf_load_stackoverflow) |
| FR (1) | FR2011590A1 (enrdf_load_stackoverflow) |
| GB (1) | GB1265545A (enrdf_load_stackoverflow) |
| NL (1) | NL6909376A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2264718A (en) * | 1992-03-04 | 1993-09-08 | Univ Hull | Vapour deposited coatings having at least three transitions in structure |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2540767A1 (fr) * | 1983-02-14 | 1984-08-17 | Instr I | Outil de coupe pourvu d'un revetement resistant a l'usure constitue de composes refractaires de metaux difficilement fusibles et procede de fabrication dudit outil de coupe |
-
1969
- 1969-06-11 GB GB1265545D patent/GB1265545A/en not_active Expired
- 1969-06-19 DE DE19691930951 patent/DE1930951A1/de active Pending
- 1969-06-19 NL NL6909376A patent/NL6909376A/xx unknown
- 1969-06-24 FR FR6921093A patent/FR2011590A1/fr not_active Withdrawn
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2264718A (en) * | 1992-03-04 | 1993-09-08 | Univ Hull | Vapour deposited coatings having at least three transitions in structure |
| GB2264718B (en) * | 1992-03-04 | 1995-04-26 | Univ Hull | Coatings produced by vapour deposition |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2011590A1 (enrdf_load_stackoverflow) | 1970-03-06 |
| NL6909376A (enrdf_load_stackoverflow) | 1969-12-30 |
| DE1930951A1 (de) | 1970-01-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed | ||
| PCNP | Patent ceased through non-payment of renewal fee |