GB1258192A - - Google Patents
Info
- Publication number
- GB1258192A GB1258192A GB1258192DA GB1258192A GB 1258192 A GB1258192 A GB 1258192A GB 1258192D A GB1258192D A GB 1258192DA GB 1258192 A GB1258192 A GB 1258192A
- Authority
- GB
- United Kingdom
- Prior art keywords
- layer
- photoconductive
- silica
- sputtering
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 6
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- 238000004544 sputter deposition Methods 0.000 abstract 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract 2
- 239000011230 binding agent Substances 0.000 abstract 2
- 150000001875 compounds Chemical class 0.000 abstract 2
- ZXBSSAFKXWFUMF-UHFFFAOYSA-N 1,2,3-trinitrofluoren-9-one Chemical compound C12=CC=CC=C2C(=O)C2=C1C=C([N+](=O)[O-])C([N+]([O-])=O)=C2[N+]([O-])=O ZXBSSAFKXWFUMF-UHFFFAOYSA-N 0.000 abstract 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 abstract 1
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 239000000956 alloy Substances 0.000 abstract 1
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 239000005388 borosilicate glass Substances 0.000 abstract 1
- 230000006866 deterioration Effects 0.000 abstract 1
- 239000003989 dielectric material Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000004519 grease Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 150000001247 metal acetylides Chemical class 0.000 abstract 1
- 150000002739 metals Chemical class 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 150000004767 nitrides Chemical class 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 239000011368 organic material Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229920003227 poly(N-vinyl carbazole) Polymers 0.000 abstract 1
- -1 polyethylene terephthalate Polymers 0.000 abstract 1
- 229920000139 polyethylene terephthalate Polymers 0.000 abstract 1
- 239000005020 polyethylene terephthalate Substances 0.000 abstract 1
- 229920001296 polysiloxane Polymers 0.000 abstract 1
- 238000001552 radio frequency sputter deposition Methods 0.000 abstract 1
- 229910052711 selenium Inorganic materials 0.000 abstract 1
- 239000011669 selenium Substances 0.000 abstract 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract 1
- 229910010271 silicon carbide Inorganic materials 0.000 abstract 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract 1
- 239000013077 target material Substances 0.000 abstract 1
- 229920005992 thermoplastic resin Polymers 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/153—Charge-receiving layers combined with additional photo- or thermo-sensitive, but not photoconductive, layers, e.g. silver-salt layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Photoreceptors In Electrophotography (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US71565768A | 1968-03-25 | 1968-03-25 | |
US71578068A | 1968-03-25 | 1968-03-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1258192A true GB1258192A (en)) | 1971-12-22 |
Family
ID=27109392
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1258192D Expired GB1258192A (en)) | 1968-03-25 | 1969-03-05 | |
GB1251723D Expired GB1251723A (en)) | 1968-03-25 | 1969-03-05 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1251723D Expired GB1251723A (en)) | 1968-03-25 | 1969-03-05 |
Country Status (9)
Country | Link |
---|---|
US (1) | US3650737A (en)) |
AT (1) | AT297436B (en)) |
BE (2) | BE727123A (en)) |
CA (1) | CA920860A (en)) |
CH (2) | CH481464A (en)) |
DE (2) | DE1907637A1 (en)) |
FR (2) | FR1602786A (en)) |
GB (2) | GB1258192A (en)) |
NL (1) | NL6904536A (en)) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3879199A (en) * | 1971-12-03 | 1975-04-22 | Xerox Corp | Surface treatment of arsenic-selenium photoconductors |
US3886025A (en) * | 1972-08-24 | 1975-05-27 | Ibm | Ferrite head |
US4013539A (en) * | 1973-01-12 | 1977-03-22 | Coulter Information Systems, Inc. | Thin film deposition apparatus |
US3901783A (en) * | 1973-02-09 | 1975-08-26 | Int Standard Electric Corp | Method of producing selenium charge electrophotographic recording plates |
US3893854A (en) * | 1973-03-30 | 1975-07-08 | Xerox Corp | Photographic articles with gaps for processing fluids |
US3901784A (en) * | 1973-11-15 | 1975-08-26 | United Aircraft Corp | Cylindrical rf sputtering apparatus |
JPS5098331A (en)) * | 1973-12-25 | 1975-08-05 | ||
US4080281A (en) * | 1976-04-09 | 1978-03-21 | Tsunehiko Endo | Apparatus for making metal films |
US4098956A (en) * | 1976-08-11 | 1978-07-04 | The United States Of America As Represented By The Secretary Of The Interior | Spectrally selective solar absorbers |
US4137142A (en) * | 1977-12-27 | 1979-01-30 | Stork Brabant B.V. | Method and apparatus for sputtering photoconductive coating on endless flexible belts or cylinders |
US4151064A (en) * | 1977-12-27 | 1979-04-24 | Coulter Stork U.S.A., Inc. | Apparatus for sputtering cylinders |
DE2954551C2 (en)) * | 1978-03-03 | 1989-02-09 | Canon K.K., Tokio/Tokyo, Jp | |
JPS54145537A (en) * | 1978-05-04 | 1979-11-13 | Canon Inc | Preparation of electrophotographic image forming material |
GB2069008B (en) * | 1980-01-16 | 1984-09-12 | Secr Defence | Coating in a glow discharge |
JPS5713777A (en) | 1980-06-30 | 1982-01-23 | Shunpei Yamazaki | Semiconductor device and manufacture thereof |
JPS5711351A (en) * | 1980-06-25 | 1982-01-21 | Shunpei Yamazaki | Electrostatic copying machine |
US5143808A (en) * | 1980-06-25 | 1992-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Printing member for electrostatic photocopying |
US4889783A (en) * | 1980-06-25 | 1989-12-26 | Semiconductor Energy Laboratory Co., Ltd. | Printing member for electrostatic photocopying |
US5545503A (en) * | 1980-06-25 | 1996-08-13 | Semiconductor Energy Laboratory Co., Ltd. | Method of making printing member for electrostatic photocopying |
US5103262A (en) * | 1980-06-25 | 1992-04-07 | Semiconductor Energy Laboratory Co., Ltd. | Printing member for electrostatic photocopying |
US5070364A (en) * | 1980-06-25 | 1991-12-03 | Semiconductor Energy Laboratory Co., Ltd. | Printing member for electrostatic photocopying |
US5144367A (en) * | 1980-06-25 | 1992-09-01 | Semiconductor Energy Laboratory Co., Ltd. | Printing member for electrostatic photocopying |
US5859443A (en) * | 1980-06-30 | 1999-01-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US5262350A (en) * | 1980-06-30 | 1993-11-16 | Semiconductor Energy Laboratory Co., Ltd. | Forming a non single crystal semiconductor layer by using an electric current |
US6900463B1 (en) | 1980-06-30 | 2005-05-31 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US4394425A (en) * | 1980-09-12 | 1983-07-19 | Canon Kabushiki Kaisha | Photoconductive member with α-Si(C) barrier layer |
US4394426A (en) * | 1980-09-25 | 1983-07-19 | Canon Kabushiki Kaisha | Photoconductive member with α-Si(N) barrier layer |
DE3200376A1 (de) * | 1981-01-09 | 1982-11-04 | Canon K.K., Tokyo | Fotoleitfaehiges element |
US4423131A (en) * | 1982-05-03 | 1983-12-27 | Xerox Corporation | Photoresponsive devices containing polyvinylsilicate coatings |
US5219698A (en) * | 1982-09-27 | 1993-06-15 | Canon Kabushiki Kaisha | Laser imaging method and apparatus for electrophotography |
JPS5957247A (ja) * | 1982-09-27 | 1984-04-02 | Canon Inc | 電子写真用感光体 |
CH663455A5 (de) * | 1984-04-19 | 1987-12-15 | Balzers Hochvakuum | Rohr mit einer innenbeschichtung. |
US4588667A (en) * | 1984-05-15 | 1986-05-13 | Xerox Corporation | Electrophotographic imaging member and process comprising sputtering titanium on substrate |
USH557H (en) * | 1986-11-07 | 1988-12-06 | The United States Of America As Represented By The Department Of Energy | Epitaxial strengthening of crystals |
JPH01188862A (ja) * | 1988-01-25 | 1989-07-28 | Minolta Camera Co Ltd | 電子写真用感光体 |
US5188876A (en) * | 1990-04-12 | 1993-02-23 | Armstrong World Industries, Inc. | Surface covering with inorganic wear layer |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2886434A (en) * | 1955-06-06 | 1959-05-12 | Horizons Inc | Protected photoconductive element and method of making same |
US2860048A (en) * | 1955-06-13 | 1958-11-11 | Haloid Xerox Inc | Xerographic plate |
US2879360A (en) * | 1956-10-01 | 1959-03-24 | Lane Wells Co | Photoconductive device having a silicon dioxide protective layer and method of making same |
US2993806A (en) * | 1956-12-17 | 1961-07-25 | Gen Tire & Rubber Co | Metal coating of plastics |
US3251686A (en) * | 1960-07-01 | 1966-05-17 | Xerox Corp | Xerographic process |
BE631700A (en)) * | 1962-04-30 | |||
US3149761A (en) * | 1962-09-18 | 1964-09-22 | Johnson & Son Inc S C | Valve actuating assembly for pressurized containers |
US3397982A (en) * | 1964-12-21 | 1968-08-20 | Xerox Corp | Xerographic plate with an inorganic glass binder having an overcoating consisting essentially of aluminum oxide |
US3397086A (en) * | 1965-03-12 | 1968-08-13 | Gen Electric | Photoconductive composition and coated article |
US3287243A (en) * | 1965-03-29 | 1966-11-22 | Bell Telephone Labor Inc | Deposition of insulating films by cathode sputtering in an rf-supported discharge |
US3484237A (en) * | 1966-06-13 | 1969-12-16 | Ibm | Organic photoconductive compositions and their use in electrophotographic processes |
-
1968
- 1968-03-25 US US715657A patent/US3650737A/en not_active Expired - Lifetime
- 1968-12-30 FR FR1602786D patent/FR1602786A/fr not_active Expired
- 1968-12-30 FR FR1604499D patent/FR1604499A/fr not_active Expired
-
1969
- 1969-01-20 BE BE727123D patent/BE727123A/xx unknown
- 1969-02-10 BE BE728199D patent/BE728199A/xx unknown
- 1969-02-15 DE DE19691907637 patent/DE1907637A1/de active Pending
- 1969-02-17 AT AT159369A patent/AT297436B/de not_active IP Right Cessation
- 1969-03-05 GB GB1258192D patent/GB1258192A/en not_active Expired
- 1969-03-05 GB GB1251723D patent/GB1251723A/en not_active Expired
- 1969-03-13 CH CH370569A patent/CH481464A/de not_active IP Right Cessation
- 1969-03-14 DE DE19691912917 patent/DE1912917B2/de not_active Withdrawn
- 1969-03-19 CH CH411469A patent/CH483078A/de not_active IP Right Cessation
- 1969-03-22 CA CA046494A patent/CA920860A/en not_active Expired
- 1969-03-24 NL NL6904536A patent/NL6904536A/xx unknown
Also Published As
Publication number | Publication date |
---|---|
US3650737A (en) | 1972-03-21 |
DE1912917A1 (de) | 1969-10-16 |
AT297436B (de) | 1972-03-27 |
GB1251723A (en)) | 1971-10-27 |
CH483078A (de) | 1969-12-15 |
BE727123A (en)) | 1969-07-01 |
BE728199A (en)) | 1969-07-16 |
DE1907637A1 (de) | 1971-01-21 |
NL6904536A (en)) | 1969-09-29 |
FR1602786A (en)) | 1971-01-25 |
CH481464A (de) | 1969-11-15 |
DE1912917B2 (de) | 1971-06-24 |
FR1604499A (en)) | 1971-11-08 |
CA920860A (en) | 1973-02-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |