GB1255347A - Improvements in semiconductor devices - Google Patents

Improvements in semiconductor devices

Info

Publication number
GB1255347A
GB1255347A GB47743/69A GB4774369A GB1255347A GB 1255347 A GB1255347 A GB 1255347A GB 47743/69 A GB47743/69 A GB 47743/69A GB 4774369 A GB4774369 A GB 4774369A GB 1255347 A GB1255347 A GB 1255347A
Authority
GB
United Kingdom
Prior art keywords
layer
oxide
deposited
ions
decomposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB47743/69A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of GB1255347A publication Critical patent/GB1255347A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/291Oxides or nitrides or carbides, e.g. ceramics, glass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00Subject matter not provided for in other groups of this subclass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Formation Of Insulating Films (AREA)
GB47743/69A 1968-10-02 1969-09-29 Improvements in semiconductor devices Expired GB1255347A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7111168 1968-10-02

Publications (1)

Publication Number Publication Date
GB1255347A true GB1255347A (en) 1971-12-01

Family

ID=13451099

Family Applications (1)

Application Number Title Priority Date Filing Date
GB47743/69A Expired GB1255347A (en) 1968-10-02 1969-09-29 Improvements in semiconductor devices

Country Status (3)

Country Link
DE (1) DE1949174B2 (enExample)
FR (1) FR2019679B1 (enExample)
GB (1) GB1255347A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2526622A1 (fr) * 1982-05-10 1983-11-10 Lohja Ab Oy Film composite, en particulier pour structures electroluminescentes a film mince
EP0435187A3 (en) * 1989-12-26 1993-01-20 Fujitsu Limited Method of fabricating a semiconductor device

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3860461A (en) * 1973-05-29 1975-01-14 Texas Instruments Inc Method for fabricating semiconductor devices utilizing composite masking
DE2658304C2 (de) * 1975-12-24 1984-12-20 Tokyo Shibaura Electric Co., Ltd., Kawasaki, Kanagawa Halbleitervorrichtung
DE2713647C2 (de) * 1977-03-28 1984-11-29 Tokyo Shibaura Electric Co., Ltd., Kawasaki, Kanagawa Halbleitervorrichtung, bestehend aus einem Halbleitersubstrat und aus einem Oberflächenschutzfilm
GB2071411B (en) * 1980-03-07 1983-12-21 Philips Electronic Associated Passivating p-n junction devices

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2526622A1 (fr) * 1982-05-10 1983-11-10 Lohja Ab Oy Film composite, en particulier pour structures electroluminescentes a film mince
GB2120845A (en) * 1982-05-10 1983-12-07 Lohja Ab Oy Combination film
EP0435187A3 (en) * 1989-12-26 1993-01-20 Fujitsu Limited Method of fabricating a semiconductor device

Also Published As

Publication number Publication date
DE1949174A1 (de) 1970-05-14
FR2019679B1 (enExample) 1974-05-24
DE1949174B2 (de) 1971-09-23
FR2019679A1 (enExample) 1970-07-03

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