GB1251674A - - Google Patents

Info

Publication number
GB1251674A
GB1251674A GB1251674DA GB1251674A GB 1251674 A GB1251674 A GB 1251674A GB 1251674D A GB1251674D A GB 1251674DA GB 1251674 A GB1251674 A GB 1251674A
Authority
GB
United Kingdom
Prior art keywords
diaphragm
annulus
foil
enclosure
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of GB1251674A publication Critical patent/GB1251674A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
GB1251674D 1968-10-15 1968-10-15 Expired GB1251674A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB4878468 1968-10-15

Publications (1)

Publication Number Publication Date
GB1251674A true GB1251674A (enrdf_load_stackoverflow) 1971-10-27

Family

ID=10449904

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1251674D Expired GB1251674A (enrdf_load_stackoverflow) 1968-10-15 1968-10-15

Country Status (1)

Country Link
GB (1) GB1251674A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3041041A1 (de) * 1980-10-31 1982-05-13 Krauss-Maffei AG, 8000 München Magneto-elektrischer wegaufnehmer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3041041A1 (de) * 1980-10-31 1982-05-13 Krauss-Maffei AG, 8000 München Magneto-elektrischer wegaufnehmer

Similar Documents

Publication Publication Date Title
US3417361A (en) Semiconductive pressure transducer
GB956286A (en) Inverter circuits
GB1497185A (en) Pressure gauges
GB1251674A (enrdf_load_stackoverflow)
JPH0665974B2 (ja) 圧力センサユニツトの製造方法
GB1062513A (en) Pressure transducer
US3493912A (en) Strain responsive transducer means of the diaphragm type
GB1300118A (en) Improvements relating to semiconductor strain transducers
GB956341A (en) Improvements in hermetic connections between a quartz disc and a metal supporting ring, and inspection windows incorporating same
JPS5821131A (ja) 半導体圧力センサ
JPS57186137A (en) Pressure sensor
GB1344565A (en) Method of forming a metallic battery casing
JPS54153684A (en) Pressure transducer
JPS59174728A (ja) 半導体式圧力センサ
JPS57186136A (en) Semiconductor pressure transducer
JPS5850443A (ja) 圧力・電気変換装置
JPS5461976A (en) Pressure detector
GB1318595A (en) Radiation detector
GB949433A (en) Improvements in or relating to pressure transducers
JPS52149992A (en) Pressure transducer
JPS5875040A (ja) 圧力置換器
JPS5299071A (en) Production of hermetic terminals
JPS54593A (en) Semiconductor displacement transducer
JPS58168931A (ja) 圧力検出器
JPS5383486A (en) Diffusion type semiconductor pressure transducer

Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee