GB1244069A - Improvements in or relating to the heat treatment of silicon plates - Google Patents

Improvements in or relating to the heat treatment of silicon plates

Info

Publication number
GB1244069A
GB1244069A GB48704/69A GB4870469A GB1244069A GB 1244069 A GB1244069 A GB 1244069A GB 48704/69 A GB48704/69 A GB 48704/69A GB 4870469 A GB4870469 A GB 4870469A GB 1244069 A GB1244069 A GB 1244069A
Authority
GB
United Kingdom
Prior art keywords
wafers
rods
silicon
oct
relating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB48704/69A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of GB1244069A publication Critical patent/GB1244069A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/14—Substrate holders or susceptors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S118/00—Coating apparatus
    • Y10S118/90—Semiconductor vapor doping

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
GB48704/69A 1968-10-04 1969-10-03 Improvements in or relating to the heat treatment of silicon plates Expired GB1244069A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19681801187 DE1801187B1 (de) 1968-10-04 1968-10-04 Vorrichtung zur Waermebehandlung von Siliziumscheiben

Publications (1)

Publication Number Publication Date
GB1244069A true GB1244069A (en) 1971-08-25

Family

ID=5709643

Family Applications (1)

Application Number Title Priority Date Filing Date
GB48704/69A Expired GB1244069A (en) 1968-10-04 1969-10-03 Improvements in or relating to the heat treatment of silicon plates

Country Status (7)

Country Link
US (1) US3604694A (enExample)
BE (1) BE739815A (enExample)
DE (1) DE1801187B1 (enExample)
FR (1) FR2019940A1 (enExample)
GB (1) GB1244069A (enExample)
NL (1) NL6913337A (enExample)
SE (1) SE341035B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0777977A3 (en) * 1995-12-05 1997-12-10 R.J. Reynolds Tobacco Company Degradable smoking article

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3669431A (en) * 1971-01-25 1972-06-13 Signetics Corp Boat pulling apparatus for diffusion furnace and method
US3705714A (en) * 1971-05-20 1972-12-12 Norton Co Silicon nitride kiln furniture
US3735965A (en) * 1972-02-29 1973-05-29 Schoger & Associates Inc Santa Furnace carrier and handling system
JPS6011457B2 (ja) * 1973-04-02 1985-03-26 株式会社日立製作所 デイポジシヨン法
GB1502754A (en) * 1975-12-22 1978-03-01 Siemens Ag Heat-treatment of semi-conductor wafers
US4278422A (en) * 1979-12-31 1981-07-14 David M. Volz Diffusion tube support collar
JPS5849290B2 (ja) * 1980-08-18 1983-11-02 富士通株式会社 石英反応管
DE3267491D1 (en) * 1981-03-02 1986-01-02 Bbc Brown Boveri & Cie Process for doping semiconductor bodies for the production of semiconductor devices
US4518349A (en) * 1983-12-01 1985-05-21 Better Semiconductor Processes (Bsp) Cantilevered boat-free semiconductor wafer handling system
US4624638A (en) * 1984-11-29 1986-11-25 Btu Engineering Corporation CVD boat loading mechanism having a separable, low profile cantilevered paddle assembly
USD327078S (en) 1988-07-25 1992-06-16 Tel Sagami Limited Instrument for transferring boats for thermal treatment of semiconductor wafers
USD326273S (en) 1988-07-25 1992-05-19 Tel Sagami Limited Heat insulating cylinder for thermal treatment of semiconductor wafers
USD326272S (en) 1988-07-25 1992-05-19 Tel Sagami Limited Heat insulating cylinder for thermal treatment of semiconductor wafers
DE102004053435A1 (de) * 2004-11-05 2006-05-11 Forschungszentrum Jülich GmbH Thermische Isolierung zur Reduzierung von Wärmeverlusten und Energieverbrauch bei Hochtemperaturanlagen

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3183130A (en) * 1962-01-22 1965-05-11 Motorola Inc Diffusion process and apparatus
GB1085299A (en) * 1964-11-23 1967-09-27 Btu Eng Corp Improvements in or relating to diffusion furnaces
DE1521481B1 (de) * 1965-10-22 1969-12-04 Siemens Ag Anordnung zur Waermebehandlung von scheibenfoermigen Halbleiterkoerpern

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0777977A3 (en) * 1995-12-05 1997-12-10 R.J. Reynolds Tobacco Company Degradable smoking article

Also Published As

Publication number Publication date
FR2019940A1 (enExample) 1970-07-10
SE341035B (enExample) 1971-12-13
DE1801187B1 (de) 1970-04-16
BE739815A (enExample) 1970-04-03
US3604694A (en) 1971-09-14
NL6913337A (enExample) 1970-04-07

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