GB1074488A - Method for the inductive zone pruification of semiconductor bodies - Google Patents

Method for the inductive zone pruification of semiconductor bodies

Info

Publication number
GB1074488A
GB1074488A GB4839664A GB4839664A GB1074488A GB 1074488 A GB1074488 A GB 1074488A GB 4839664 A GB4839664 A GB 4839664A GB 4839664 A GB4839664 A GB 4839664A GB 1074488 A GB1074488 A GB 1074488A
Authority
GB
United Kingdom
Prior art keywords
rod
coil
circular
zone
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4839664A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wacker Chemie AG
Original Assignee
Wacker Chemie AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wacker Chemie AG filed Critical Wacker Chemie AG
Publication of GB1074488A publication Critical patent/GB1074488A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

In the zone-melting of a rod using an induction heating coil with or without a crucible, the coil is spaced non-uniformly around the rod. The rod may be circular or non-circular cross-section. A plurality of rods side by side may be converted into a single rod. The coil may be of circular Fig. 1, pear-shaped (Fig. 2) or other cross-section (Figs. 3 and 4). It may be pancake, funnel or cylinder shaped. When the rod and coil are both of circular crosssection, they are arranged eccentrically. The distance between rod and coil may be 0.2-2 times the diameter of the rod. The minimum distance may be 0.5 mm. A rod may be zone-melted first without and then with reduction in diameter using a pear-shaped coil and a seed crystal which may be of the same or small diameter than the rod. A long rod may be reduced in stages employing a succession of seeds on a rotary table. The rod may be of silicon, boron or a III-V compound.
GB4839664A 1963-12-03 1964-11-27 Method for the inductive zone pruification of semiconductor bodies Expired GB1074488A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEW0035753 1963-12-03

Publications (1)

Publication Number Publication Date
GB1074488A true GB1074488A (en) 1967-07-05

Family

ID=7601002

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4839664A Expired GB1074488A (en) 1963-12-03 1964-11-27 Method for the inductive zone pruification of semiconductor bodies

Country Status (2)

Country Link
DE (1) DE1249836B (en)
GB (1) GB1074488A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4092124A (en) * 1975-07-29 1978-05-30 Siemens Aktiengesellschaft Apparatus for floating melt zone processing of a semiconductor rod

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2538854B2 (en) * 1975-09-01 1979-02-15 Wacker-Chemitronic Gesellschaft Fuer Elektronik-Grundstoffe Mbh, 8263 Burghausen Single-turn induction heating coil for crucible-free zone melting

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4092124A (en) * 1975-07-29 1978-05-30 Siemens Aktiengesellschaft Apparatus for floating melt zone processing of a semiconductor rod

Also Published As

Publication number Publication date
DE1249836B (en) 1967-09-14

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