BE769289A - Procede de fabrication de tetrafluorure de silicium - Google Patents
Procede de fabrication de tetrafluorure de siliciumInfo
- Publication number
- BE769289A BE769289A BE769289A BE769289A BE769289A BE 769289 A BE769289 A BE 769289A BE 769289 A BE769289 A BE 769289A BE 769289 A BE769289 A BE 769289A BE 769289 A BE769289 A BE 769289A
- Authority
- BE
- Belgium
- Prior art keywords
- manufacturing process
- silicon tetrafluoride
- tetrafluoride
- silicon
- manufacturing
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US5169970A | 1970-07-01 | 1970-07-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE769289A true BE769289A (fr) | 1971-11-03 |
Family
ID=21972835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE769289A BE769289A (fr) | 1970-07-01 | 1971-06-30 | Procede de fabrication de tetrafluorure de silicium |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3674431A (fr) |
| JP (1) | JPS5323791B1 (fr) |
| BE (1) | BE769289A (fr) |
| DE (1) | DE2132427C3 (fr) |
| FR (1) | FR2098119A5 (fr) |
| GB (1) | GB1322843A (fr) |
| NL (1) | NL7109021A (fr) |
| SE (1) | SE360845B (fr) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2079262B (en) * | 1980-07-02 | 1984-03-28 | Central Glass Co Ltd | Process of preparing silicon tetrafluoride by using hydrogen fluoride gas |
| US4470959A (en) * | 1983-06-20 | 1984-09-11 | Allied Corporation | Continuous production of silicon tetrafluoride gas in a vertical column |
| DE3432678C2 (de) * | 1984-09-05 | 1986-11-20 | D. Swarovski & Co., Wattens, Tirol | Verfahren zur Herstellung von Siliciumtetrafluorid |
| ZA95482B (en) * | 1994-01-31 | 1995-10-09 | Atomic Energy South Africa | Treatment of a chemical |
| US6956348B2 (en) * | 2004-01-28 | 2005-10-18 | Irobot Corporation | Debris sensor for cleaning apparatus |
| JP4014451B2 (ja) * | 2001-09-11 | 2007-11-28 | セントラル硝子株式会社 | 四フッ化珪素の製造法 |
| JP5341425B2 (ja) * | 2008-08-08 | 2013-11-13 | ステラケミファ株式会社 | フッ化物ガスの製造方法 |
| DE102013104398A1 (de) * | 2013-04-30 | 2014-10-30 | Spawnt Private S.À.R.L. | Verfahren zur Herstellung von Siliziumtetrafluorid |
-
1970
- 1970-07-01 US US51699A patent/US3674431A/en not_active Expired - Lifetime
-
1971
- 1971-06-30 JP JP4733771A patent/JPS5323791B1/ja active Pending
- 1971-06-30 SE SE08438/71A patent/SE360845B/xx unknown
- 1971-06-30 BE BE769289A patent/BE769289A/fr unknown
- 1971-06-30 DE DE2132427A patent/DE2132427C3/de not_active Expired
- 1971-06-30 FR FR7123895A patent/FR2098119A5/fr not_active Expired
- 1971-06-30 GB GB3056871A patent/GB1322843A/en not_active Expired
- 1971-06-30 NL NL7109021A patent/NL7109021A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| DE2132427A1 (de) | 1972-01-05 |
| FR2098119A5 (fr) | 1972-03-03 |
| GB1322843A (en) | 1973-07-11 |
| DE2132427C3 (de) | 1978-04-13 |
| NL7109021A (fr) | 1972-01-04 |
| SE360845B (fr) | 1973-10-08 |
| DE2132427B2 (de) | 1977-09-08 |
| US3674431A (en) | 1972-07-04 |
| JPS5323791B1 (fr) | 1978-07-17 |
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