JPS5323791B1 - - Google Patents

Info

Publication number
JPS5323791B1
JPS5323791B1 JP4733771A JP4733771A JPS5323791B1 JP S5323791 B1 JPS5323791 B1 JP S5323791B1 JP 4733771 A JP4733771 A JP 4733771A JP 4733771 A JP4733771 A JP 4733771A JP S5323791 B1 JPS5323791 B1 JP S5323791B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4733771A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5323791B1 publication Critical patent/JPS5323791B1/ja
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/08Compounds containing halogen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
JP4733771A 1970-07-01 1971-06-30 Pending JPS5323791B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US5169970A 1970-07-01 1970-07-01

Publications (1)

Publication Number Publication Date
JPS5323791B1 true JPS5323791B1 (ja) 1978-07-17

Family

ID=21972835

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4733771A Pending JPS5323791B1 (ja) 1970-07-01 1971-06-30

Country Status (8)

Country Link
US (1) US3674431A (ja)
JP (1) JPS5323791B1 (ja)
BE (1) BE769289A (ja)
DE (1) DE2132427C3 (ja)
FR (1) FR2098119A5 (ja)
GB (1) GB1322843A (ja)
NL (1) NL7109021A (ja)
SE (1) SE360845B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9731968B2 (en) 2008-08-08 2017-08-15 Stella Chemifa Corporation Process for producing fluoride gas

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2079262B (en) * 1980-07-02 1984-03-28 Central Glass Co Ltd Process of preparing silicon tetrafluoride by using hydrogen fluoride gas
US4470959A (en) * 1983-06-20 1984-09-11 Allied Corporation Continuous production of silicon tetrafluoride gas in a vertical column
DE3432678C2 (de) * 1984-09-05 1986-11-20 D. Swarovski & Co., Wattens, Tirol Verfahren zur Herstellung von Siliciumtetrafluorid
ZA95482B (en) * 1994-01-31 1995-10-09 Atomic Energy South Africa Treatment of a chemical
US6956348B2 (en) * 2004-01-28 2005-10-18 Irobot Corporation Debris sensor for cleaning apparatus
JP4014451B2 (ja) * 2001-09-11 2007-11-28 セントラル硝子株式会社 四フッ化珪素の製造法
DE102013104398A1 (de) * 2013-04-30 2014-10-30 Spawnt Private S.À.R.L. Verfahren zur Herstellung von Siliziumtetrafluorid

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9731968B2 (en) 2008-08-08 2017-08-15 Stella Chemifa Corporation Process for producing fluoride gas

Also Published As

Publication number Publication date
FR2098119A5 (ja) 1972-03-03
NL7109021A (ja) 1972-01-04
SE360845B (ja) 1973-10-08
DE2132427A1 (de) 1972-01-05
DE2132427C3 (de) 1978-04-13
US3674431A (en) 1972-07-04
BE769289A (fr) 1971-11-03
GB1322843A (en) 1973-07-11
DE2132427B2 (de) 1977-09-08

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