CA643374A - Process and apparatus for pyrolytic production of hyperpure semiconductor material, particularly silicon - Google Patents

Process and apparatus for pyrolytic production of hyperpure semiconductor material, particularly silicon

Info

Publication number
CA643374A
CA643374A CA643374A CA643374DA CA643374A CA 643374 A CA643374 A CA 643374A CA 643374 A CA643374 A CA 643374A CA 643374D A CA643374D A CA 643374DA CA 643374 A CA643374 A CA 643374A
Authority
CA
Canada
Prior art keywords
semiconductor material
particularly silicon
pyrolytic production
hyperpure
hyperpure semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA643374A
Inventor
Reuschel Konrad
Schink Norbert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Schuckertwerke AG
Original Assignee
Siemens Schuckertwerke AG
Publication date
Application granted granted Critical
Publication of CA643374A publication Critical patent/CA643374A/en
Expired legal-status Critical Current

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CA643374A Process and apparatus for pyrolytic production of hyperpure semiconductor material, particularly silicon Expired CA643374A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA643374T

Publications (1)

Publication Number Publication Date
CA643374A true CA643374A (en) 1962-06-19

Family

ID=35921904

Family Applications (1)

Application Number Title Priority Date Filing Date
CA643374A Expired CA643374A (en) Process and apparatus for pyrolytic production of hyperpure semiconductor material, particularly silicon

Country Status (1)

Country Link
CA (1) CA643374A (en)

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