CA676343A - Apparatus for pyrolytic production of semiconductor material - Google Patents

Apparatus for pyrolytic production of semiconductor material

Info

Publication number
CA676343A
CA676343A CA676343A CA676343DA CA676343A CA 676343 A CA676343 A CA 676343A CA 676343 A CA676343 A CA 676343A CA 676343D A CA676343D A CA 676343DA CA 676343 A CA676343 A CA 676343A
Authority
CA
Canada
Prior art keywords
semiconductor material
pyrolytic production
pyrolytic
production
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA676343A
Inventor
Reuschel Konrad
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Schuckertwerke AG
Original Assignee
Siemens Schuckertwerke AG
Publication date
Application granted granted Critical
Publication of CA676343A publication Critical patent/CA676343A/en
Expired legal-status Critical Current

Links

CA676343A Apparatus for pyrolytic production of semiconductor material Expired CA676343A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA676343T

Publications (1)

Publication Number Publication Date
CA676343A true CA676343A (en) 1963-12-17

Family

ID=35977427

Family Applications (1)

Application Number Title Priority Date Filing Date
CA676343A Expired CA676343A (en) Apparatus for pyrolytic production of semiconductor material

Country Status (1)

Country Link
CA (1) CA676343A (en)

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