CA728584A - Process and apparatus for producing silicon - Google Patents

Process and apparatus for producing silicon

Info

Publication number
CA728584A
CA728584A CA728584A CA873673A CA728584A CA 728584 A CA728584 A CA 728584A CA 728584 A CA728584 A CA 728584A CA 873673 A CA873673 A CA 873673A CA 728584 A CA728584 A CA 728584A
Authority
CA
Canada
Prior art keywords
producing silicon
silicon
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA728584A
Inventor
Bettman Max
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Union Carbide Corp
Original Assignee
Union Carbide Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Union Carbide Corp filed Critical Union Carbide Corp
Application granted granted Critical
Publication of CA728584A publication Critical patent/CA728584A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/029—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of monosilane
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/021—Preparation
    • C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
    • C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
CA728584A 1962-05-11 1963-04-19 Process and apparatus for producing silicon Expired CA728584A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US19400862A 1962-05-11 1962-05-11

Publications (1)

Publication Number Publication Date
CA728584A true CA728584A (en) 1966-02-22

Family

ID=22715945

Family Applications (1)

Application Number Title Priority Date Filing Date
CA728584A Expired CA728584A (en) 1962-05-11 1963-04-19 Process and apparatus for producing silicon

Country Status (2)

Country Link
CA (1) CA728584A (en)
NL (1) NL292610A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0294908A2 (en) * 1987-06-11 1988-12-14 Advanced Silicon Materials, Inc. Improved process for the production of ultra high purity polycrystalline silicon
EP0324504A2 (en) * 1988-01-15 1989-07-19 Advanced Silicon Materials, Inc. Method for forming uniformly large-diameter polycrystalline rods by the pyrolysis of silane and a reactor system therefor
US5382419A (en) * 1992-09-28 1995-01-17 Advanced Silicon Materials, Inc. Production of high-purity polycrystalline silicon rod for semiconductor applications
US5478396A (en) * 1992-09-28 1995-12-26 Advanced Silicon Materials, Inc. Production of high-purity polycrystalline silicon rod for semiconductor applications
WO2016184638A1 (en) * 2015-05-15 2016-11-24 Schmid Silicon Technology Gmbh Process and system for decomposing monosilane

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2572312B1 (en) * 1984-10-30 1989-01-20 Rhone Poulenc Spec Chim PROCESS FOR MANUFACTURING ULTRA-PUR SILICON BARS

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0294908A2 (en) * 1987-06-11 1988-12-14 Advanced Silicon Materials, Inc. Improved process for the production of ultra high purity polycrystalline silicon
EP0294908A3 (en) * 1987-06-11 1989-03-01 Union Carbide Corporation Improved process for the production of ultra high purity polycrystalline silicon
EP0324504A2 (en) * 1988-01-15 1989-07-19 Advanced Silicon Materials, Inc. Method for forming uniformly large-diameter polycrystalline rods by the pyrolysis of silane and a reactor system therefor
EP0324504A3 (en) * 1988-01-15 1990-09-26 Union Carbide Corporation Method for forming uniformly large-diameter polycrystalline rods by the pyrolysis of silane and a reactor system therefor
US5382419A (en) * 1992-09-28 1995-01-17 Advanced Silicon Materials, Inc. Production of high-purity polycrystalline silicon rod for semiconductor applications
US5478396A (en) * 1992-09-28 1995-12-26 Advanced Silicon Materials, Inc. Production of high-purity polycrystalline silicon rod for semiconductor applications
US5545387A (en) * 1992-09-28 1996-08-13 Advanced Silcon Materials, Inc. Production of high-purity polycrystalline silicon rod for semiconductor applications
USRE36936E (en) * 1992-09-28 2000-10-31 Advanced Silicon Materials, Inc. Production of high-purity polycrystalline silicon rod for semiconductor applications
WO2016184638A1 (en) * 2015-05-15 2016-11-24 Schmid Silicon Technology Gmbh Process and system for decomposing monosilane
US10414660B2 (en) 2015-05-15 2019-09-17 Schmid Silicon Technology Gmbh Process and plant that decomposes monosilane

Also Published As

Publication number Publication date
NL292610A (en) 1900-01-01

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