CA709366A - Method and apparatus for pyrolytic production of hyperpure semiconductor material - Google Patents

Method and apparatus for pyrolytic production of hyperpure semiconductor material

Info

Publication number
CA709366A
CA709366A CA709366A CA709366DA CA709366A CA 709366 A CA709366 A CA 709366A CA 709366 A CA709366 A CA 709366A CA 709366D A CA709366D A CA 709366DA CA 709366 A CA709366 A CA 709366A
Authority
CA
Canada
Prior art keywords
semiconductor material
pyrolytic production
hyperpure
hyperpure semiconductor
pyrolytic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA709366A
Inventor
Schink Norbert
Reuschel Konrad
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Schuckertwerke AG
Original Assignee
Siemens Schuckertwerke AG
Publication date
Application granted granted Critical
Publication of CA709366A publication Critical patent/CA709366A/en
Expired legal-status Critical Current

Links

CA709366A Method and apparatus for pyrolytic production of hyperpure semiconductor material Expired CA709366A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA709366T

Publications (1)

Publication Number Publication Date
CA709366A true CA709366A (en) 1965-05-11

Family

ID=36038639

Family Applications (1)

Application Number Title Priority Date Filing Date
CA709366A Expired CA709366A (en) Method and apparatus for pyrolytic production of hyperpure semiconductor material

Country Status (1)

Country Link
CA (1) CA709366A (en)

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