CA802164A - Apparatus for the production of semiconductor material - Google Patents

Apparatus for the production of semiconductor material

Info

Publication number
CA802164A
CA802164A CA802164A CA802164DA CA802164A CA 802164 A CA802164 A CA 802164A CA 802164 A CA802164 A CA 802164A CA 802164D A CA802164D A CA 802164DA CA 802164 A CA802164 A CA 802164A
Authority
CA
Canada
Prior art keywords
production
semiconductor material
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA802164A
Inventor
Rummel Theodor
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Publication date
Application granted granted Critical
Publication of CA802164A publication Critical patent/CA802164A/en
Expired legal-status Critical Current

Links

CA802164A Apparatus for the production of semiconductor material Expired CA802164A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA802164T

Publications (1)

Publication Number Publication Date
CA802164A true CA802164A (en) 1968-12-24

Family

ID=36270197

Family Applications (1)

Application Number Title Priority Date Filing Date
CA802164A Expired CA802164A (en) Apparatus for the production of semiconductor material

Country Status (1)

Country Link
CA (1) CA802164A (en)

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