USD326273S - Heat insulating cylinder for thermal treatment of semiconductor wafers - Google Patents

Heat insulating cylinder for thermal treatment of semiconductor wafers Download PDF

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Publication number
USD326273S
USD326273S US07/301,997 US30199789F USD326273S US D326273 S USD326273 S US D326273S US 30199789 F US30199789 F US 30199789F US D326273 S USD326273 S US D326273S
Authority
US
United States
Prior art keywords
heat insulating
thermal treatment
semiconductor wafers
insulating cylinder
cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US07/301,997
Inventor
Ken Nakao
Seishiro Sato
Wataru Ohkase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Original Assignee
Tokyo Electron Sagami Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Sagami Ltd filed Critical Tokyo Electron Sagami Ltd
Assigned to TEL SAGAMI LIMITED A CORPORATION OF JAPAN reassignment TEL SAGAMI LIMITED A CORPORATION OF JAPAN ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: NAKAO, KEN, OHKASE, WATARU, SATO, SEISHIRO
Application granted granted Critical
Publication of USD326273S publication Critical patent/USD326273S/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a front elevational view of a heat insulating cylinder for thermal treatment of semiconductor wafers showing our new design;
FIG. 2 is a right side elevational view, the left side elevational view being a mirror image;
FIG. 3 is a top plan view;
FIG. 4 is a bottom plan view; and,
FIG. 5 is a rear elevational view thereof.

Claims (1)

  1. The ornamental design for a heat insulating cylinder for thermal treatment of semiconductor wafers, as shown and described.
US07/301,997 1988-07-25 1989-01-25 Heat insulating cylinder for thermal treatment of semiconductor wafers Expired - Lifetime USD326273S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP63-29832 1988-02-10
JP2983288 1988-07-25

Publications (1)

Publication Number Publication Date
USD326273S true USD326273S (en) 1992-05-19

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ID=70477582

Family Applications (1)

Application Number Title Priority Date Filing Date
US07/301,997 Expired - Lifetime USD326273S (en) 1988-07-25 1989-01-25 Heat insulating cylinder for thermal treatment of semiconductor wafers

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US (1) USD326273S (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD901564S1 (en) * 2019-01-28 2020-11-10 Kokusai Electric Corporation Gas inlet attachment for wafer processing apparatus
USD952126S1 (en) * 2017-01-06 2022-05-17 Minka Lighting, Inc. Ceiling fan housing
USD958929S1 (en) * 2018-11-21 2022-07-26 Inter-Med, Inc. Minimal waste dispensing tip

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD952126S1 (en) * 2017-01-06 2022-05-17 Minka Lighting, Inc. Ceiling fan housing
USD958929S1 (en) * 2018-11-21 2022-07-26 Inter-Med, Inc. Minimal waste dispensing tip
US11590517B2 (en) 2018-11-21 2023-02-28 Inter-Med, Inc. Universal minimal waste dispensing tip
USD901564S1 (en) * 2019-01-28 2020-11-10 Kokusai Electric Corporation Gas inlet attachment for wafer processing apparatus

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