GB1241371A - Apparatus for electron beam irradiation - Google Patents
Apparatus for electron beam irradiationInfo
- Publication number
- GB1241371A GB1241371A GB09316/69A GB1931669A GB1241371A GB 1241371 A GB1241371 A GB 1241371A GB 09316/69 A GB09316/69 A GB 09316/69A GB 1931669 A GB1931669 A GB 1931669A GB 1241371 A GB1241371 A GB 1241371A
- Authority
- GB
- United Kingdom
- Prior art keywords
- membrane
- less
- electrons
- beam irradiation
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
- H01J33/02—Details
- H01J33/04—Windows
Abstract
1,241,371. Electron beam irradiation apparatus. T.I. (GROUP SERVICES) Ltd. 14 April, 1970 [16 April, 1969], No. 19316/69. Heading H1D. The window of an electron beam irradiation apparatus comprises an electron permeable membrane of titanium or aluminium adapted to withstand atmospheric pressure, and a second membrane spaced from the first and permeable to electrons and to gas. The second membrane may be a mesh of aluminium, titanium, nickel, stainless steel, or non-metallic material and a cooling gas may be circulated between the membranes without disturbing the irradiated material, which may be paint. Preferably, the gas flow is achieved by providing equal and opposite and negative pressures along two edges of the membrane, so that the mean pressure on one side is the same as that on the opposite side, e.g. atmospheric pressure, and the gas flow should be in the same direction as that of the work. The second membrane should absorb less than 50% and preferably less than 30% of the incident electrons and should have apertures less than 5 mm. across. The membrane may include wires that absorb substantially all incident electrons, in which case the area of the membrane should be not less than 80% open. Alternatively, a better distribution of the electron dose in the work may be achieved if the solid parts of the membrane are so thin that the total mass thickness of the solid parts, together with the cooling gas and the first membrane is less than half the range of the electrons used (which is proportional to the mass traversed). In this case the area of the solid parts should be 40-60%.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB09316/69A GB1241371A (en) | 1969-04-16 | 1969-04-16 | Apparatus for electron beam irradiation |
US29231A US3624391A (en) | 1969-04-16 | 1970-04-16 | Window structure for electron beam irradiation |
NL7005508A NL7005508A (en) | 1969-04-16 | 1970-04-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB09316/69A GB1241371A (en) | 1969-04-16 | 1969-04-16 | Apparatus for electron beam irradiation |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1241371A true GB1241371A (en) | 1971-08-04 |
Family
ID=10127350
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB09316/69A Expired GB1241371A (en) | 1969-04-16 | 1969-04-16 | Apparatus for electron beam irradiation |
Country Status (3)
Country | Link |
---|---|
US (1) | US3624391A (en) |
GB (1) | GB1241371A (en) |
NL (1) | NL7005508A (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4261762A (en) * | 1979-09-14 | 1981-04-14 | Eaton Corporation | Method for conducting heat to or from an article being treated under vacuum |
US4514636A (en) * | 1979-09-14 | 1985-04-30 | Eaton Corporation | Ion treatment apparatus |
US4743570A (en) * | 1979-12-21 | 1988-05-10 | Varian Associates, Inc. | Method of thermal treatment of a wafer in an evacuated environment |
US4909314A (en) * | 1979-12-21 | 1990-03-20 | Varian Associates, Inc. | Apparatus for thermal treatment of a wafer in an evacuated environment |
US4680061A (en) * | 1979-12-21 | 1987-07-14 | Varian Associates, Inc. | Method of thermal treatment of a wafer in an evacuated environment |
DE10007650C2 (en) * | 2000-02-19 | 2003-04-10 | Leica Microsystems | Light-optical microscope with electron beam device |
US7295015B2 (en) * | 2004-02-19 | 2007-11-13 | Brooks Automation, Inc. | Ionization gauge |
US7030619B2 (en) * | 2004-02-19 | 2006-04-18 | Brooks Automation, Inc. | Ionization gauge |
JP5154232B2 (en) * | 2005-02-18 | 2013-02-27 | アイエムエス ナノファブリケーション エージー | Charged particle exposure equipment |
WO2007107211A1 (en) * | 2006-03-20 | 2007-09-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Device for altering the characteristics of three-dimensional shaped parts using electrons |
JP5241195B2 (en) * | 2006-10-30 | 2013-07-17 | アイエムエス ナノファブリカツィオン アーゲー | Charged particle exposure system |
US7768267B2 (en) * | 2007-07-11 | 2010-08-03 | Brooks Automation, Inc. | Ionization gauge with a cold electron source |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2907704A (en) * | 1957-07-19 | 1959-10-06 | High Voltage Engineering Corp | Electron irradiation |
US3418155A (en) * | 1965-09-30 | 1968-12-24 | Ford Motor Co | Electron discharge control |
US3440466A (en) * | 1965-09-30 | 1969-04-22 | Ford Motor Co | Window support and heat sink for electron-discharge device |
US3486060A (en) * | 1967-09-06 | 1969-12-23 | High Voltage Engineering Corp | Cooling apparatus with laminar flow for electron permeable windows |
-
1969
- 1969-04-16 GB GB09316/69A patent/GB1241371A/en not_active Expired
-
1970
- 1970-04-16 NL NL7005508A patent/NL7005508A/xx unknown
- 1970-04-16 US US29231A patent/US3624391A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
NL7005508A (en) | 1970-10-20 |
US3624391A (en) | 1971-11-30 |
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