GB1025389A - Improvements in or relating to microanalyzers - Google Patents

Improvements in or relating to microanalyzers

Info

Publication number
GB1025389A
GB1025389A GB4627162A GB4627162A GB1025389A GB 1025389 A GB1025389 A GB 1025389A GB 4627162 A GB4627162 A GB 4627162A GB 4627162 A GB4627162 A GB 4627162A GB 1025389 A GB1025389 A GB 1025389A
Authority
GB
United Kingdom
Prior art keywords
rays
electron beam
dec
detector
path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4627162A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Akashi Seisakusho KK
Original Assignee
Akashi Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akashi Seisakusho KK filed Critical Akashi Seisakusho KK
Publication of GB1025389A publication Critical patent/GB1025389A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1,025,389. Electron beam apparatus; X-ray tubes. AKUSHI SEISAKUSHO KABUSHIKI KAISHA. Dec. 7, 1962 [Dec. 9, 1961], No. 46271/62. Heading H1D. In an X-ray microanalyzer the incident electron beam e is deflected at 8 so that the resulting X-rays x may be observed at right angles to the surface of the test sample 9. It is explained that this reduces errors due to shading at local concavities in the surface under test and also improves the ratio of the detected intensity of the characteristic X-rays to that of the continuous ones. The electron beam passes through two electromagnetic condenser lenses 4, 6 before reaching the deflector 8; as shown, this is a single fan-shaped electromagnet but to reduce aberrations a double arrangement may be used (Fig. 2, not shown). An analysing crystal 11 is movable along the path of the X-rays and, with a detector 12, is rotatable about its centre. The detector is connected through an amplifier 13 to a counter 14 and recorder 15. Electrons diffracted from the surface along a path f are detected by a photographic plate 16.
GB4627162A 1961-12-09 1962-12-07 Improvements in or relating to microanalyzers Expired GB1025389A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4415561 1961-12-09

Publications (1)

Publication Number Publication Date
GB1025389A true GB1025389A (en) 1966-04-06

Family

ID=12683718

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4627162A Expired GB1025389A (en) 1961-12-09 1962-12-07 Improvements in or relating to microanalyzers

Country Status (1)

Country Link
GB (1) GB1025389A (en)

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