NL7005508A - - Google Patents
Info
- Publication number
- NL7005508A NL7005508A NL7005508A NL7005508A NL7005508A NL 7005508 A NL7005508 A NL 7005508A NL 7005508 A NL7005508 A NL 7005508A NL 7005508 A NL7005508 A NL 7005508A NL 7005508 A NL7005508 A NL 7005508A
- Authority
- NL
- Netherlands
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
- H01J33/02—Details
- H01J33/04—Windows
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB09316/69A GB1241371A (en) | 1969-04-16 | 1969-04-16 | Apparatus for electron beam irradiation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL7005508A true NL7005508A (en) | 1970-10-20 |
Family
ID=10127350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL7005508A NL7005508A (en) | 1969-04-16 | 1970-04-16 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US3624391A (en) |
| GB (1) | GB1241371A (en) |
| NL (1) | NL7005508A (en) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4514636A (en) * | 1979-09-14 | 1985-04-30 | Eaton Corporation | Ion treatment apparatus |
| US4261762A (en) * | 1979-09-14 | 1981-04-14 | Eaton Corporation | Method for conducting heat to or from an article being treated under vacuum |
| US4680061A (en) * | 1979-12-21 | 1987-07-14 | Varian Associates, Inc. | Method of thermal treatment of a wafer in an evacuated environment |
| US4743570A (en) * | 1979-12-21 | 1988-05-10 | Varian Associates, Inc. | Method of thermal treatment of a wafer in an evacuated environment |
| US4909314A (en) * | 1979-12-21 | 1990-03-20 | Varian Associates, Inc. | Apparatus for thermal treatment of a wafer in an evacuated environment |
| DE10007650C2 (en) * | 2000-02-19 | 2003-04-10 | Leica Microsystems | Light-optical microscope with electron beam device |
| US7295015B2 (en) * | 2004-02-19 | 2007-11-13 | Brooks Automation, Inc. | Ionization gauge |
| US7030619B2 (en) * | 2004-02-19 | 2006-04-18 | Brooks Automation, Inc. | Ionization gauge |
| JP5154232B2 (en) * | 2005-02-18 | 2013-02-27 | アイエムエス ナノファブリケーション エージー | Charged particle exposure equipment |
| WO2007107211A1 (en) * | 2006-03-20 | 2007-09-27 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Device for altering the characteristics of three-dimensional shaped parts using electrons |
| JP5241195B2 (en) * | 2006-10-30 | 2013-07-17 | アイエムエス ナノファブリカツィオン アーゲー | Charged particle exposure system |
| US7768267B2 (en) * | 2007-07-11 | 2010-08-03 | Brooks Automation, Inc. | Ionization gauge with a cold electron source |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2907704A (en) * | 1957-07-19 | 1959-10-06 | High Voltage Engineering Corp | Electron irradiation |
| US3418155A (en) * | 1965-09-30 | 1968-12-24 | Ford Motor Co | Electron discharge control |
| US3440466A (en) * | 1965-09-30 | 1969-04-22 | Ford Motor Co | Window support and heat sink for electron-discharge device |
| US3486060A (en) * | 1967-09-06 | 1969-12-23 | High Voltage Engineering Corp | Cooling apparatus with laminar flow for electron permeable windows |
-
1969
- 1969-04-16 GB GB09316/69A patent/GB1241371A/en not_active Expired
-
1970
- 1970-04-16 US US29231A patent/US3624391A/en not_active Expired - Lifetime
- 1970-04-16 NL NL7005508A patent/NL7005508A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| US3624391A (en) | 1971-11-30 |
| GB1241371A (en) | 1971-08-04 |