GB1236891A - An electron gun for heating materials in an evacuated container - Google Patents

An electron gun for heating materials in an evacuated container

Info

Publication number
GB1236891A
GB1236891A GB5443/70A GB544370A GB1236891A GB 1236891 A GB1236891 A GB 1236891A GB 5443/70 A GB5443/70 A GB 5443/70A GB 544370 A GB544370 A GB 544370A GB 1236891 A GB1236891 A GB 1236891A
Authority
GB
United Kingdom
Prior art keywords
flange
deflecting
gun
secured
legs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5443/70A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Heraeus Verwaltung GmbH
Original Assignee
Leybold Heraeus Verwaltung GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus Verwaltung GmbH filed Critical Leybold Heraeus Verwaltung GmbH
Publication of GB1236891A publication Critical patent/GB1236891A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002Details
    • H01J37/3007Electron or ion-optical systems
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/063Geometrical arrangement of electrodes for beam-forming

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Abstract

1,236,891. Electron beam furnaces. LEYBOLDHERAEUS - VERWALTUNG G.m.b.H. 4 Feb., 1970 [6 Nov., 1969], No. 5443/70. Heading H1D. In an electron beam apparatus for melting, welding, or evaporating material in a high vacuum so that the apparatus must be baked to release adsorbed gas, the coils for focusing and deflecting the beam are arranged so that they can be removed during the baking process. In Fig. 1 the end of the tube 19 terminating the electron gun is welded to a flange 20 through which are sealed a pair of magnetic legs 23 which terminate in polepieces 24 for deflecting the beam. The deflecting magnet comprises an annular yoke 25 with a pair of depending members 27 adapted to rest on the tops of the legs 23 and surrounded by deflecting coils 28. The yoke 25, a spacer 38 and the focusing lens 32 are secured to a cylindrical container 29 which is removable and which is retained in its operative position by the protective casing 34 which surrounds the upper end of the gun and is secured to the flange 15 by a releasable push- and-turn coupling (not shown). In a modification the legs 23 are sealed through the tube 19 instead of through the mounting flange 20 which, as shown, is bolted to a flange 22 in the wall of the furnace 6 with an interposed sealing ring 21. The electron gun comprises a hot cathode 7, a Wehnelt cylinder 8 and a conical anode 18 supported between flanges 14 and 15 by spacing rings 16 and 17. A ceramic insulator 13 is secured to flange 14 and is joined at its other end to a flange 12. High-tension supply cables (not shown) for the gun are connected to two push-in contacts 9 and 10 which co-operate with contact pins on an insulated flange 11.
GB5443/70A 1969-11-06 1970-02-04 An electron gun for heating materials in an evacuated container Expired GB1236891A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1955846A DE1955846C3 (en) 1969-11-06 1969-11-06 Electron gun for heating materials in a vacuum container

Publications (1)

Publication Number Publication Date
GB1236891A true GB1236891A (en) 1971-06-23

Family

ID=5750306

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5443/70A Expired GB1236891A (en) 1969-11-06 1970-02-04 An electron gun for heating materials in an evacuated container

Country Status (4)

Country Link
US (1) US3652821A (en)
JP (1) JPS5022280B1 (en)
DE (1) DE1955846C3 (en)
GB (1) GB1236891A (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3770934A (en) * 1971-10-29 1973-11-06 Machlett Lab Inc Electron beam heating apparatus
FR2188255A1 (en) * 1972-06-05 1974-01-18 Commissariat Energie Atomique Electron beam deviating prism - using electro magnetic elements with air gap in iron circuit
DE2519537C2 (en) * 1975-05-02 1982-11-04 Leybold-Heraeus GmbH, 5000 Köln Electron beam device for heating, melting and evaporation purposes with deflection systems
DE2528032C2 (en) * 1975-06-24 1983-06-09 Leybold-Heraeus GmbH, 5000 Köln Electron beam generators for heating, melting and evaporation purposes
JPS522679U (en) * 1975-06-24 1977-01-10
DE3328172A1 (en) * 1983-08-04 1985-02-14 Leybold-Heraeus GmbH, 5000 Köln ELECTRON BEAM CANNON
EP0196710A1 (en) * 1985-03-28 1986-10-08 Koninklijke Philips Electronics N.V. Electron beam apparatus comprising an anode which is included in the cathode/Wehnelt cylinder unit
DE3532888A1 (en) * 1985-09-14 1987-04-02 Leybold Heraeus Gmbh & Co Kg Arrangement for controlling the deflection of an electron beam
US5185530A (en) * 1990-11-05 1993-02-09 Jeol Ltd. Electron beam instrument
DE9411676U1 (en) * 1994-07-08 1994-10-13 BESTEC GmbH, 12489 Berlin Electron beam source
JP6437316B2 (en) * 2014-02-14 2018-12-12 日本電子株式会社 Electron gun, three-dimensional additive manufacturing apparatus, and electron gun control method
RU2709793C1 (en) * 2018-07-09 2019-12-20 Публичное акционерное общество "Электромеханика" Electron-beam gun with increased service life

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2840740A (en) * 1955-08-24 1958-06-24 Gen Electric Combination yoke clamp and terminal cover
DE1248175B (en) * 1961-08-31 1967-08-24 Heraeus Gmbh W C Electron gun
NL295045A (en) * 1962-07-09
US3504211A (en) * 1965-05-12 1970-03-31 Hitachi Ltd Electron beam control device for use with a cathode ray tube for dynamic correction of electron beam astigmatism and defocusing

Also Published As

Publication number Publication date
US3652821A (en) 1972-03-28
DE1955846B2 (en) 1973-04-12
DE1955846A1 (en) 1972-01-05
JPS5022280B1 (en) 1975-07-29
DE1955846C3 (en) 1973-10-31

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