GB1236891A - An electron gun for heating materials in an evacuated container - Google Patents
An electron gun for heating materials in an evacuated containerInfo
- Publication number
- GB1236891A GB1236891A GB5443/70A GB544370A GB1236891A GB 1236891 A GB1236891 A GB 1236891A GB 5443/70 A GB5443/70 A GB 5443/70A GB 544370 A GB544370 A GB 544370A GB 1236891 A GB1236891 A GB 1236891A
- Authority
- GB
- United Kingdom
- Prior art keywords
- flange
- deflecting
- gun
- secured
- legs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 title abstract 2
- 238000010438 heat treatment Methods 0.000 title 1
- 238000010894 electron beam technology Methods 0.000 abstract 2
- 239000000919 ceramic Substances 0.000 abstract 1
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 239000012212 insulator Substances 0.000 abstract 1
- 238000002844 melting Methods 0.000 abstract 1
- 230000008018 melting Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000004048 modification Effects 0.000 abstract 1
- 238000012986 modification Methods 0.000 abstract 1
- 230000001681 protective effect Effects 0.000 abstract 1
- 230000000717 retained effect Effects 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
- 125000006850 spacer group Chemical group 0.000 abstract 1
- 238000003466 welding Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3007—Electron or ion-optical systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/063—Geometrical arrangement of electrodes for beam-forming
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Particle Accelerators (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Abstract
1,236,891. Electron beam furnaces. LEYBOLDHERAEUS - VERWALTUNG G.m.b.H. 4 Feb., 1970 [6 Nov., 1969], No. 5443/70. Heading H1D. In an electron beam apparatus for melting, welding, or evaporating material in a high vacuum so that the apparatus must be baked to release adsorbed gas, the coils for focusing and deflecting the beam are arranged so that they can be removed during the baking process. In Fig. 1 the end of the tube 19 terminating the electron gun is welded to a flange 20 through which are sealed a pair of magnetic legs 23 which terminate in polepieces 24 for deflecting the beam. The deflecting magnet comprises an annular yoke 25 with a pair of depending members 27 adapted to rest on the tops of the legs 23 and surrounded by deflecting coils 28. The yoke 25, a spacer 38 and the focusing lens 32 are secured to a cylindrical container 29 which is removable and which is retained in its operative position by the protective casing 34 which surrounds the upper end of the gun and is secured to the flange 15 by a releasable push- and-turn coupling (not shown). In a modification the legs 23 are sealed through the tube 19 instead of through the mounting flange 20 which, as shown, is bolted to a flange 22 in the wall of the furnace 6 with an interposed sealing ring 21. The electron gun comprises a hot cathode 7, a Wehnelt cylinder 8 and a conical anode 18 supported between flanges 14 and 15 by spacing rings 16 and 17. A ceramic insulator 13 is secured to flange 14 and is joined at its other end to a flange 12. High-tension supply cables (not shown) for the gun are connected to two push-in contacts 9 and 10 which co-operate with contact pins on an insulated flange 11.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE1955846A DE1955846C3 (en) | 1969-11-06 | 1969-11-06 | Electron gun for heating materials in a vacuum container |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1236891A true GB1236891A (en) | 1971-06-23 |
Family
ID=5750306
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5443/70A Expired GB1236891A (en) | 1969-11-06 | 1970-02-04 | An electron gun for heating materials in an evacuated container |
Country Status (4)
Country | Link |
---|---|
US (1) | US3652821A (en) |
JP (1) | JPS5022280B1 (en) |
DE (1) | DE1955846C3 (en) |
GB (1) | GB1236891A (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3770934A (en) * | 1971-10-29 | 1973-11-06 | Machlett Lab Inc | Electron beam heating apparatus |
FR2188255A1 (en) * | 1972-06-05 | 1974-01-18 | Commissariat Energie Atomique | Electron beam deviating prism - using electro magnetic elements with air gap in iron circuit |
DE2519537C2 (en) * | 1975-05-02 | 1982-11-04 | Leybold-Heraeus GmbH, 5000 Köln | Electron beam device for heating, melting and evaporation purposes with deflection systems |
DE2528032C2 (en) * | 1975-06-24 | 1983-06-09 | Leybold-Heraeus GmbH, 5000 Köln | Electron beam generators for heating, melting and evaporation purposes |
JPS522679U (en) * | 1975-06-24 | 1977-01-10 | ||
DE3328172A1 (en) * | 1983-08-04 | 1985-02-14 | Leybold-Heraeus GmbH, 5000 Köln | ELECTRON BEAM CANNON |
EP0196710A1 (en) * | 1985-03-28 | 1986-10-08 | Koninklijke Philips Electronics N.V. | Electron beam apparatus comprising an anode which is included in the cathode/Wehnelt cylinder unit |
DE3532888A1 (en) * | 1985-09-14 | 1987-04-02 | Leybold Heraeus Gmbh & Co Kg | Arrangement for controlling the deflection of an electron beam |
US5185530A (en) * | 1990-11-05 | 1993-02-09 | Jeol Ltd. | Electron beam instrument |
DE9411676U1 (en) * | 1994-07-08 | 1994-10-13 | BESTEC GmbH, 12489 Berlin | Electron beam source |
JP6437316B2 (en) * | 2014-02-14 | 2018-12-12 | 日本電子株式会社 | Electron gun, three-dimensional additive manufacturing apparatus, and electron gun control method |
RU2709793C1 (en) * | 2018-07-09 | 2019-12-20 | Публичное акционерное общество "Электромеханика" | Electron-beam gun with increased service life |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2840740A (en) * | 1955-08-24 | 1958-06-24 | Gen Electric | Combination yoke clamp and terminal cover |
DE1248175B (en) * | 1961-08-31 | 1967-08-24 | Heraeus Gmbh W C | Electron gun |
BE634726A (en) * | 1962-07-09 | |||
US3504211A (en) * | 1965-05-12 | 1970-03-31 | Hitachi Ltd | Electron beam control device for use with a cathode ray tube for dynamic correction of electron beam astigmatism and defocusing |
-
1969
- 1969-11-06 DE DE1955846A patent/DE1955846C3/en not_active Expired
-
1970
- 1970-02-04 GB GB5443/70A patent/GB1236891A/en not_active Expired
- 1970-02-25 US US14008A patent/US3652821A/en not_active Expired - Lifetime
- 1970-03-12 JP JP45021189A patent/JPS5022280B1/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
DE1955846A1 (en) | 1972-01-05 |
DE1955846B2 (en) | 1973-04-12 |
JPS5022280B1 (en) | 1975-07-29 |
US3652821A (en) | 1972-03-28 |
DE1955846C3 (en) | 1973-10-31 |
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