JPS55151738A - Electron gun - Google Patents

Electron gun

Info

Publication number
JPS55151738A
JPS55151738A JP6081379A JP6081379A JPS55151738A JP S55151738 A JPS55151738 A JP S55151738A JP 6081379 A JP6081379 A JP 6081379A JP 6081379 A JP6081379 A JP 6081379A JP S55151738 A JPS55151738 A JP S55151738A
Authority
JP
Japan
Prior art keywords
central electrode
insulator
electrode
dislocate
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6081379A
Other languages
Japanese (ja)
Other versions
JPS6025857B2 (en
Inventor
Hideo Hiraoka
Hiroaki Tanji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP54060813A priority Critical patent/JPS6025857B2/en
Publication of JPS55151738A publication Critical patent/JPS55151738A/en
Publication of JPS6025857B2 publication Critical patent/JPS6025857B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Solid Thermionic Cathode (AREA)

Abstract

PURPOSE:To maintain a stable electron beam for a long period of time by providing a concentrically cylindrical external electrode through an insulator on the periphery of a central electrode supporting a cathode and a heating element. CONSTITUTION:An insulator 26 and an external electrode 31 are closely and concentrically provided at a place where a central electrode 23 is centered. Since the central electrode 23 does not dislocate horizontally, although often dislocate vertically due to the thermal expansion of each part, electron beam can be stably emitted for a long period of time because no shifting of the central electrode 23 from the center of a Wehnelt opening 6 occurs. Also, the position of the central electrode 23 can be automatically regulted by means of the insulator 26.
JP54060813A 1979-05-17 1979-05-17 electron gun Expired JPS6025857B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54060813A JPS6025857B2 (en) 1979-05-17 1979-05-17 electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54060813A JPS6025857B2 (en) 1979-05-17 1979-05-17 electron gun

Publications (2)

Publication Number Publication Date
JPS55151738A true JPS55151738A (en) 1980-11-26
JPS6025857B2 JPS6025857B2 (en) 1985-06-20

Family

ID=13153156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54060813A Expired JPS6025857B2 (en) 1979-05-17 1979-05-17 electron gun

Country Status (1)

Country Link
JP (1) JPS6025857B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2414856A (en) * 2004-06-03 2005-12-07 Nanobeam Ltd Charged particle beam gun
US8159118B2 (en) 2005-11-02 2012-04-17 United Technologies Corporation Electron gun
DE102010049062A1 (en) * 2010-10-20 2012-04-26 Volodymyr Granovskyy Device for visual control of position adjustment of cathode of electron gun of electron microscope e.g. scanning microscope, has glasses with diametrically arranged apertures formed corresponding to cathode in working position
JP6422561B1 (en) * 2017-09-04 2018-11-14 国家納米科学中心 Filament positioning system and filament positioning method
US10636617B2 (en) 2016-09-07 2020-04-28 Paton Turbine Technologies Llc Axial electron gun

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2414856A (en) * 2004-06-03 2005-12-07 Nanobeam Ltd Charged particle beam gun
GB2414856B (en) * 2004-06-03 2008-11-12 Nanobeam Ltd Charged particle gun
US7855373B2 (en) 2004-06-03 2010-12-21 Nanobeam Limited Charged particle gun
US8159118B2 (en) 2005-11-02 2012-04-17 United Technologies Corporation Electron gun
DE102010049062A1 (en) * 2010-10-20 2012-04-26 Volodymyr Granovskyy Device for visual control of position adjustment of cathode of electron gun of electron microscope e.g. scanning microscope, has glasses with diametrically arranged apertures formed corresponding to cathode in working position
US10636617B2 (en) 2016-09-07 2020-04-28 Paton Turbine Technologies Llc Axial electron gun
JP6422561B1 (en) * 2017-09-04 2018-11-14 国家納米科学中心 Filament positioning system and filament positioning method

Also Published As

Publication number Publication date
JPS6025857B2 (en) 1985-06-20

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