JPS5022280B1 - - Google Patents

Info

Publication number
JPS5022280B1
JPS5022280B1 JP45021189A JP2118970A JPS5022280B1 JP S5022280 B1 JPS5022280 B1 JP S5022280B1 JP 45021189 A JP45021189 A JP 45021189A JP 2118970 A JP2118970 A JP 2118970A JP S5022280 B1 JPS5022280 B1 JP S5022280B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP45021189A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5022280B1 publication Critical patent/JPS5022280B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3007—Electron or ion-optical systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
JP45021189A 1969-11-06 1970-03-12 Pending JPS5022280B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1955846A DE1955846C3 (de) 1969-11-06 1969-11-06 Elektronenkanone fur die Erhitzung von Materialien in einem Vakuumbehalter

Publications (1)

Publication Number Publication Date
JPS5022280B1 true JPS5022280B1 (ja) 1975-07-29

Family

ID=5750306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP45021189A Pending JPS5022280B1 (ja) 1969-11-06 1970-03-12

Country Status (4)

Country Link
US (1) US3652821A (ja)
JP (1) JPS5022280B1 (ja)
DE (1) DE1955846C3 (ja)
GB (1) GB1236891A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS522679U (ja) * 1975-06-24 1977-01-10

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3770934A (en) * 1971-10-29 1973-11-06 Machlett Lab Inc Electron beam heating apparatus
FR2188255A1 (en) * 1972-06-05 1974-01-18 Commissariat Energie Atomique Electron beam deviating prism - using electro magnetic elements with air gap in iron circuit
DE2519537C2 (de) * 1975-05-02 1982-11-04 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahlgerät für Heiz-, Schmelz- und Verdampfungszwecke mit Ablenksystemen
DE2528032C2 (de) * 1975-06-24 1983-06-09 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahlerzeuger für Heiz-, Schmelz- und Verdampfungszwecke
DE3328172A1 (de) * 1983-08-04 1985-02-14 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahlkanone
EP0196710A1 (en) * 1985-03-28 1986-10-08 Koninklijke Philips Electronics N.V. Electron beam apparatus comprising an anode which is included in the cathode/Wehnelt cylinder unit
DE3532888A1 (de) * 1985-09-14 1987-04-02 Leybold Heraeus Gmbh & Co Kg Anordnung zur regelung der ablenkung eines elektronenstrahls
US5185530A (en) * 1990-11-05 1993-02-09 Jeol Ltd. Electron beam instrument
DE9411676U1 (de) * 1994-07-08 1994-10-13 BESTEC GmbH, 12489 Berlin Elektronenstrahlquelle
JP6437316B2 (ja) * 2014-02-14 2018-12-12 日本電子株式会社 電子銃、三次元積層造形装置及び電子銃制御方法
RU2709793C1 (ru) * 2018-07-09 2019-12-20 Публичное акционерное общество "Электромеханика" Электронно-лучевая пушка с повышенным ресурсом эксплуатации

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2840740A (en) * 1955-08-24 1958-06-24 Gen Electric Combination yoke clamp and terminal cover
DE1248175B (de) * 1961-08-31 1967-08-24 Heraeus Gmbh W C Elektronenstrahlerzeugungssystem
NL295045A (ja) * 1962-07-09
US3504211A (en) * 1965-05-12 1970-03-31 Hitachi Ltd Electron beam control device for use with a cathode ray tube for dynamic correction of electron beam astigmatism and defocusing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS522679U (ja) * 1975-06-24 1977-01-10

Also Published As

Publication number Publication date
US3652821A (en) 1972-03-28
DE1955846B2 (de) 1973-04-12
DE1955846A1 (de) 1972-01-05
GB1236891A (en) 1971-06-23
DE1955846C3 (de) 1973-10-31

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