GB1196003A - Improvements in or relating to Corpuscular Beam Apparatus. - Google Patents

Improvements in or relating to Corpuscular Beam Apparatus.

Info

Publication number
GB1196003A
GB1196003A GB45409/67A GB4540967A GB1196003A GB 1196003 A GB1196003 A GB 1196003A GB 45409/67 A GB45409/67 A GB 45409/67A GB 4540967 A GB4540967 A GB 4540967A GB 1196003 A GB1196003 A GB 1196003A
Authority
GB
United Kingdom
Prior art keywords
ball
airlock
holder
rotate
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB45409/67A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Original Assignee
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft zur Foerderung der Wissenschaften eV filed Critical Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Publication of GB1196003A publication Critical patent/GB1196003A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Physical Vapour Deposition (AREA)
GB45409/67A 1967-02-24 1967-10-05 Improvements in or relating to Corpuscular Beam Apparatus. Expired GB1196003A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEM72882A DE1286239B (de) 1967-02-24 1967-02-24 Korpuskularstrahlgeraet, insbesondere Elektronenmikroskop, mit einer Schleuseinrichtung

Publications (1)

Publication Number Publication Date
GB1196003A true GB1196003A (en) 1970-06-24

Family

ID=7314725

Family Applications (1)

Application Number Title Priority Date Filing Date
GB45409/67A Expired GB1196003A (en) 1967-02-24 1967-10-05 Improvements in or relating to Corpuscular Beam Apparatus.

Country Status (4)

Country Link
US (1) US3474247A (de)
DE (1) DE1286239B (de)
GB (1) GB1196003A (de)
NL (1) NL6802472A (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5125781A (en) * 1990-01-24 1992-06-30 Recot, Inc. Air lock for transfer of product into and out of vacuum or pressurized chamber

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL185735B (nl) * 1954-03-09 Knogo Corp Inrichting voor het detecteren in een ondervragingszone van een voorwerp waarop een resonantie-orgaan is bevestigd.

Also Published As

Publication number Publication date
NL6802472A (de) 1968-08-26
DE1286239B (de) 1969-01-02
US3474247A (en) 1969-10-21

Similar Documents

Publication Publication Date Title
US2292087A (en) Evacuated electronic apparatus
GB1450320A (en) Multiconfiguration ionization source
GB653934A (en) Improvements in or relating to electronic microscopes
GB1433945A (en) Electronbeam tubes for scanning electron microscopes
GB1453083A (en) Cathode ray tubes
GB1196003A (en) Improvements in or relating to Corpuscular Beam Apparatus.
GB913956A (en) Improvements in and relating to ion sources
GB1029588A (en) Pressure vessel
JPS57134559A (en) Physical vapor deposition device
GB1193159A (en) Improvements in or relating to Corpuscular Beam Apparatus
GB1163530A (en) Electron beam generating apparatus
US2397207A (en) Lens coating apparatus
GB1206174A (en) Method and apparatus for use in repairing electron tubes
GB1092803A (en) Improvements in or relating to mass spectrometers
JPS544061A (en) Test piece chamber for electronic microscope or the like
GB1423353A (en) Vacuum lock
US2845540A (en) Apparatus for use with corpuscular rays
GB824903A (en) Improvements in or relating to electron microscopes
GB1291221A (en) Electron probe forming system
GB1007398A (en) Device for providing a vacuum-tight passageway
GB1031028A (en) Apparatus for the electron-optical inspection of the surfaces of objects
GB1045405A (en) Apparatus for the machining of workpieces by means of a beam of charge carriers
GB1188870A (en) Electron Microscope.
GB1218909A (en) Improvements in or relating to devices for displacing and replacing the specimen, in vacuum-tight analysis equipment
GB1322475A (en) Air locks for use in electrical high tension apparatus

Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees