GB1181750A - An Ultrahigh-Vacuum Enclosure - Google Patents

An Ultrahigh-Vacuum Enclosure

Info

Publication number
GB1181750A
GB1181750A GB59444/68A GB5944468A GB1181750A GB 1181750 A GB1181750 A GB 1181750A GB 59444/68 A GB59444/68 A GB 59444/68A GB 5944468 A GB5944468 A GB 5944468A GB 1181750 A GB1181750 A GB 1181750A
Authority
GB
United Kingdom
Prior art keywords
chamber
enclosure
skirt
vacuum
acting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB59444/68A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of GB1181750A publication Critical patent/GB1181750A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
GB59444/68A 1968-01-05 1968-12-13 An Ultrahigh-Vacuum Enclosure Expired GB1181750A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR135093 1968-01-05

Publications (1)

Publication Number Publication Date
GB1181750A true GB1181750A (en) 1970-02-18

Family

ID=8644212

Family Applications (1)

Application Number Title Priority Date Filing Date
GB59444/68A Expired GB1181750A (en) 1968-01-05 1968-12-13 An Ultrahigh-Vacuum Enclosure

Country Status (8)

Country Link
US (1) US3512369A (enrdf_load_stackoverflow)
BE (1) BE725393A (enrdf_load_stackoverflow)
DE (1) DE1900454A1 (enrdf_load_stackoverflow)
ES (1) ES362123A1 (enrdf_load_stackoverflow)
FR (1) FR1557891A (enrdf_load_stackoverflow)
GB (1) GB1181750A (enrdf_load_stackoverflow)
LU (1) LU57621A1 (enrdf_load_stackoverflow)
NL (1) NL6900130A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2319035A1 (fr) * 1975-07-22 1977-02-18 Physimeca Appareil pour faire le vide a l'interieur d'une enceinte
US4311018A (en) * 1979-12-17 1982-01-19 Varian Associates, Inc. Cryogenic pump
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
US4763483A (en) * 1986-07-17 1988-08-16 Helix Technology Corporation Cryopump and method of starting the cryopump
US4907413A (en) * 1988-06-02 1990-03-13 Grumman Aerospace Corporation Regenerable cryosorption pump with movable physical barrier and physical barrier thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2737779A (en) * 1946-05-24 1956-03-13 Ernest O Lawrence Condensable vapor extraction apparatus
US3360949A (en) * 1965-09-20 1968-01-02 Air Reduction Cryopumping configuration
US3327491A (en) * 1966-06-08 1967-06-27 Andonian Associates Inc Windowless vacuum chamber for exposing a cooled device to successive samplers

Also Published As

Publication number Publication date
LU57621A1 (enrdf_load_stackoverflow) 1969-04-08
BE725393A (enrdf_load_stackoverflow) 1969-05-16
DE1900454A1 (de) 1969-09-04
ES362123A1 (es) 1970-11-01
FR1557891A (enrdf_load_stackoverflow) 1969-02-21
NL6900130A (enrdf_load_stackoverflow) 1969-07-08
US3512369A (en) 1970-05-19

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